Low-Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD

1990 ◽  
Vol 29 (Part 2, No. 8) ◽  
pp. L1483-L1485 ◽  
Author(s):  
Jin Wei ◽  
Hiroshi Kawarada ◽  
Jun-ichi Suzuki ◽  
Akio Hiraki
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Microwave Plasma Cvd

Fabrication of diamond films at low temperature by pulse-modulated magneto-active microwave plasma CVD

1996 ◽  
Vol 5 (2) ◽  
pp. 235-240 ◽  
Author(s):  
A Hatta ◽  
H Suzuki ◽  
K Kadota ◽  
H Makita ◽  
T Ito ◽  
...  
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Deposition of large area uniform diamond films by microwave plasma CVD

Vacuum ◽  
2018 ◽  
Vol 147 ◽  
pp. 134-142 ◽  
Author(s):  
J. Weng ◽  
F. Liu ◽  
L.W. Xiong ◽  
J.H. Wang ◽  
Q. Sun
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd

High-speed synthesis of heavily boron-doped diamond films by in-liquid microwave plasma CVD

2019 ◽  
Vol 92 ◽  
pp. 41-46 ◽  
Author(s):  
Yohei Harada ◽  
Ryota Hishinuma ◽  
Nicolae Spătaru ◽  
Yusei Sakurai ◽  
Kazuya Miyasaka ◽  
...  
Keyword(s):  
High Speed ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Boron Doped Diamond ◽  
Boron Doped ◽  
Microwave Plasma Cvd

Low-temperature graphene synthesis using microwave plasma CVD

2013 ◽  
Vol 46 (6) ◽  
pp. 063001 ◽  
Author(s):  
Takatoshi Yamada ◽  
Jaeho Kim ◽  
Masatou Ishihara ◽  
Masataka Hasegawa
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Graphene Synthesis ◽  
Microwave Plasma Cvd

Thermal Conductivity of Diamond Films Synthesized by Microwave Plasma CVD

1986 ◽  
Vol 25 (Part 2, No. 10) ◽  
pp. L808-L810 ◽  
Author(s):  
Akira Ono ◽  
Tetsuya Baba ◽  
Hiroyuki Funamoto ◽  
Akira Nishikawa
Keyword(s):  
Thermal Conductivity ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd
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