Dry etching of deep air holes in GaAs/AlGaAs-based epi-wafer having InAs quantum dots for fabrication of photonic crystal laser
2017 ◽
Vol 56
(12)
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pp. 126501
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Keyword(s):
2020 ◽
Vol 59
(8)
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pp. 086505
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Keyword(s):
Keyword(s):
2002 ◽