Local Leakage Current of HfO2 Thin Films Characterized by Conducting Atomic Force Microscopy
Keyword(s):
2011 ◽
Vol 50
(4)
◽
pp. 04DA08
◽
1999 ◽
Vol 353
(1-2)
◽
pp. 194-200
◽
Keyword(s):
2012 ◽
Vol 30
(2)
◽
pp. 021605
◽