Local Leakage Current of HfO2 Thin Films Characterized by Conducting Atomic Force Microscopy

2002 ◽  
Author(s):  
Hiroya Ikeda ◽  
Tomokazu Goto ◽  
Mitsuo Sakashita ◽  
Akira Sakai ◽  
Shigeaki Zaima ◽  
...  
2010 ◽  
Author(s):  
M. Adachi ◽  
M. Sakashita ◽  
H. Kondo ◽  
W. Takeuchi ◽  
O. Nakatsuka ◽  
...  

2011 ◽  
Vol 50 (4S) ◽  
pp. 04DA08
Author(s):  
Masaki Adachi ◽  
Yuzo Kato ◽  
Kimihiko Kato ◽  
Mitsuo Sakashita ◽  
Hiroki Kondo ◽  
...  

2011 ◽  
Vol 50 (4) ◽  
pp. 04DA08 ◽  
Author(s):  
Masaki Adachi ◽  
Yuzo Kato ◽  
Kimihiko Kato ◽  
Mitsuo Sakashita ◽  
Hiroki Kondo ◽  
...  

1999 ◽  
Vol 353 (1-2) ◽  
pp. 194-200 ◽  
Author(s):  
C. Coupeau ◽  
J.F. Naud ◽  
F. Cleymand ◽  
P. Goudeau ◽  
J. Grilhé

Author(s):  
Xiaohong Jiang ◽  
Guoyun Wu ◽  
Zuliang Du ◽  
Keng-Jeng Ma ◽  
Jun-ichi Shirakashi ◽  
...  

1995 ◽  
Vol 382 ◽  
Author(s):  
Martin Pehnt ◽  
Douglas L. Schulz ◽  
Calvin J. Curtis ◽  
Helio R. Moutinho ◽  
Amy Swartzlander ◽  
...  

ABSTRACTIn this article we report the first nanoparticle-derived route to smooth, dense, phase-pure CdTe thin films. Capped CdTe nanoparticles were prepared by injection of a mixture of Cd(CH3)2, (n-C8H17)3 PTe and (n-C8H17)3P into (n-C8H17)3PO at elevated temperatures. The resultant nanoparticles 32-45 Å in diameter were characterized by x-ray diffraction, UV-Vis spectroscopy, transmission electron microscopy, thermogravimetric analysis and energy dispersive x-ray spectroscopy. CdTe thin film deposition was accomplished by dissolving CdTe nanoparticles in butanol and then spraying the solution onto SnO2-coated glass substrates at variable susceptor temperatures. Smooth and dense CdTe thin films were obtained using growth temperatures approximately 200 °C less than conventional spray pyrolysis approaches. CdTe films were characterized by x-ray diffraction, UV-Vis spectroscopy, atomic force microscopy, and Auger electron spectroscopy. An increase in crystallinity and average grain size as determined by x-ray diffraction was noted as growth temperature was increased from 240 to 300 °C. This temperature dependence of film grain size was further confirmed by atomic force microscopy with no remnant nanocrystalline morphological features detected. UV-Vis characterization of the CdTe thin films revealed a gradual decrease of the band gap (i.e., elimination of nanocrystalline CdTe phase) as the growth temperature was increased with bulk CdTe optical properties observed for films grown at 300 °C.


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