Diameter-controlled 2-dimensional Array of Si Nanodisk using Bio-nano-process and Neutral Beam Etching for Realistic Quantum Effect Devices

2008 ◽  
Author(s):  
C. H. Huang ◽  
M. Igarashi ◽  
T. Kubota ◽  
M. Takeguchi ◽  
K. Nishioka ◽  
...  
Keyword(s):  
Quantum Effect ◽  
Neutral Beam ◽  
Dimensional Array ◽  
Si Nanodisk ◽  
Neutral Beam Etching

Two-Dimensional Si-Nanodisk Array Fabricated Using Bio-Nano-Process and Neutral Beam Etching for Realistic Quantum Effect Devices

2009 ◽  
Vol 48 (4) ◽  
pp. 04C187 ◽  
Author(s):  
Chi-Hsien Huang ◽  
Makoto Igarashi ◽  
Michel Woné ◽  
Yukiharu Uraoka ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Quantum Effect ◽  
Neutral Beam ◽  
Two Dimensional ◽  
Si Nanodisk ◽  
Neutral Beam Etching

Novel Si Nanodisk Fabricated by Biotemplate and Defect-Free Neutral Beam Etching for Solar Cell Application

2010 ◽  
Vol 49 (4) ◽  
pp. 04DL16 ◽  
Author(s):  
Chi-Hsien Huang ◽  
Makoto Igarashi ◽  
Susumu Horita ◽  
Masaki Takeguchi ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Solar Cell ◽  
Neutral Beam ◽  
Solar Cell Application ◽  
Si Nanodisk ◽  
Neutral Beam Etching

Quantum dot solar cells using 2-dimensional array of 6.4-nm-diameter silicon nanodisks fabricated using bio-templates and neutral beam etching

2012 ◽  
Vol 101 (6) ◽  
pp. 063121 ◽  
Author(s):  
Makoto Igarashi ◽  
Mohd Fairuz Budiman ◽  
Wugen Pan ◽  
Weiguo Hu ◽  
Noritaka Usami ◽  
...  
Keyword(s):  
Solar Cells ◽  
Quantum Dot ◽  
Neutral Beam ◽  
Dimensional Array ◽  
Quantum Dot Solar Cells ◽  
Neutral Beam Etching

Novel Stacked Nanodisk with Quantum Effect Fabricated by Defect-free Chlorine Neutral Beam Etching

2008 ◽  
Vol 1 ◽  
pp. 084002 ◽  
Author(s):  
Chi-Hsien Huang ◽  
Makoto Igarashi ◽  
Kensuke Nishioka ◽  
Masaki Takeguchi ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Quantum Effect ◽  
Free Chlorine ◽  
Neutral Beam ◽  
Neutral Beam Etching
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