Two-Dimensional Si-Nanodisk Array Fabricated Using Bio-Nano-Process and Neutral Beam Etching for Realistic Quantum Effect Devices

2009 ◽  
Vol 48 (4) ◽  
pp. 04C187 ◽  
Author(s):  
Chi-Hsien Huang ◽  
Makoto Igarashi ◽  
Michel Woné ◽  
Yukiharu Uraoka ◽  
Takashi Fuyuki ◽  
...  
Keyword(s):  
Quantum Effect ◽  
Neutral Beam ◽  
Two Dimensional ◽  
Si Nanodisk ◽  
Neutral Beam Etching

Novel Si Nanodisk Fabricated by Biotemplate and Defect-Free Neutral Beam Etching for Solar Cell Application

2010 ◽  
Vol 49 (4) ◽  
pp. 04DL16 ◽  
Author(s):  
Chi-Hsien Huang ◽  
Makoto Igarashi ◽  
Susumu Horita ◽  
Masaki Takeguchi ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Solar Cell ◽  
Neutral Beam ◽  
Solar Cell Application ◽  
Si Nanodisk ◽  
Neutral Beam Etching

Novel Stacked Nanodisk with Quantum Effect Fabricated by Defect-free Chlorine Neutral Beam Etching

2008 ◽  
Vol 1 ◽  
pp. 084002 ◽  
Author(s):  
Chi-Hsien Huang ◽  
Makoto Igarashi ◽  
Kensuke Nishioka ◽  
Masaki Takeguchi ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Quantum Effect ◽  
Free Chlorine ◽  
Neutral Beam ◽  
Neutral Beam Etching

Damage-free top-down processes for fabricating two-dimensional arrays of 7 nm GaAs nanodiscs using bio-templates and neutral beam etching

2011 ◽  
Vol 22 (36) ◽  
pp. 365301 ◽  
Author(s):  
Xuan-Yu Wang ◽  
Chi-Hsien Huang ◽  
Rikako Tsukamoto ◽  
Pierre-Andre Mortemousque ◽  
Kohei M Itoh ◽  
...  
Keyword(s):  
Neutral Beam ◽  
Two Dimensional ◽  
Top Down ◽  
Neutral Beam Etching
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