MEMS Resonance Test for Mechanical Characterization of Nano-Scale Thin Films

2010 ◽  
Author(s):  
H. Yamagiwa ◽  
D. Goto ◽  
T. Namazu ◽  
T. Takeuchi ◽  
K. Murakami ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Characterization ◽  
Nano Scale ◽  
Resonance Test

scholarly journals Open-source micro-tensile testers via additive manufacturing for the mechanical characterization of thin films and papers

PLoS ONE ◽  
2018 ◽  
Vol 13 (5) ◽  
pp. e0197999 ◽  
Author(s):  
Krishanu Nandy ◽  
David W. Collinson ◽  
Charlie M. Scheftic ◽  
L. Catherine Brinson
Keyword(s):  
Thin Films ◽  
Additive Manufacturing ◽  
Open Source ◽  
Mechanical Characterization ◽  
Tensile Testers

scholarly journals Characterization of Nano-Scale Defects in Pulsed Laser Deposited (PLD) Thin Films of Li3xNd(2/3-x)(1/3-2x)TiO3 (NLTO) by Aberration Corrected HR-STEM Imaging and Dual-EELS

2020 ◽  
Vol 26 (S2) ◽  
pp. 3166-3167
Author(s):  
Robert Williams ◽  
Nuria Bagues ◽  
Elahe Farghadany ◽  
Alp Sehirlioglu ◽  
David McComb
Keyword(s):  
Thin Films ◽  
Pulsed Laser ◽  
Nano Scale ◽  
Aberration Corrected

Mechanical characterization of low-k and barrier dielectric thin films

2005 ◽  
Vol 82 (3-4) ◽  
pp. 368-373 ◽  
Author(s):  
N. Chérault ◽  
G. Carlotti ◽  
N. Casanova ◽  
P. Gergaud ◽  
C. Goldberg ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Characterization ◽  
Dielectric Thin Films ◽  
Low K

Fabrication and Mechanical Characterization of Semi-Free-Standing (Conjugated) Polymer Thin Films

Langmuir ◽  
2013 ◽  
Vol 30 (18) ◽  
pp. 5217-5223 ◽  
Author(s):  
Jaime Martín ◽  
Miguel Muñoz ◽  
Mario Encinar ◽  
Montserrat Calleja ◽  
Marisol Martín-González
Keyword(s):  
Thin Films ◽  
Conjugated Polymer ◽  
Mechanical Characterization ◽  
Polymer Thin Films ◽  
Free Standing

Mechanical characterization of thin films by depth-sensing indentation

2015 ◽  
pp. 407-425
Author(s):  
Jorge M. Antunes ◽  
José V. Fernandes ◽  
Natalyia A. Sakharova
Keyword(s):  
Thin Films ◽  
Mechanical Characterization ◽  
Depth Sensing
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