Plasma Sources for a High Flux of Active Species

AbstractThe operating regimes of two rf-plasma sources, an Oxford CARS-25 and an EPI Unibulb, have been extensively characterized. By changing the exit aperture configuration and using an electrostatic deflector, the Oxford source could produce either primarily atomic nitrogen, atomic nitrogen mixed with low energy ions, or a large flux of higher energy ions (>65eV) as the active species in a background of neutral molecular nitrogen. The EPI source produced a significant flux of metastable molecular nitrogen as the active species with a smaller atomic nitrogen component. Nitridation of sapphire using each source under the various operating conditions indicate that the reactivity was different for each type of active nitrogen. Boron contamination originating from the pyrolytic boron nitride plasma cell liner was observed.

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Plasma Sources for Production of High Flux Particle Beams in Hyperthermal Energy Range

Applied Science and Convergence Technology ◽

10.5757/jkvs.2009.18.3.186 ◽

2009 ◽

Vol 18 (3) ◽

pp. 186-196 ◽

Cited By ~ 4

Author(s):

S.J. Yoo ◽

S.B. Kim

Keyword(s):

Energy Range ◽

High Flux ◽

Particle Beams ◽

Plasma Sources ◽

Hyperthermal Energy

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Non Thermal Plasma Sources of Production of Active Species for Biomedical Uses: Analyses, Optimization and Prospect

Biomedical Engineering - Frontiers and Challenges ◽

10.5772/19129 ◽

2011 ◽

Cited By ~ 5

Author(s):

M. Yousfi ◽

N. Merbahi ◽

J. P. ◽

O. Eichwald ◽

A. Ricard ◽

...

Keyword(s):

Thermal Plasma ◽

Active Species ◽

Plasma Sources ◽

Non Thermal Plasma

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RF plasma sources for III-nitrides growth: influence of operating conditions and device geometry on active species production and InN film properties

physica status solidi (a) ◽

10.1002/pssa.200563502 ◽

2006 ◽

Vol 203 (1) ◽

pp. 106-111 ◽

Cited By ~ 2

Author(s):

P. A. Anderson ◽

R. J. Reeves ◽

S. M. Durbin

Keyword(s):

Active Species ◽

Operating Conditions ◽

Rf Plasma ◽

Film Properties ◽

Plasma Sources ◽

Device Geometry ◽

Species Production

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Influence of Active Nitrogen Species on the Nitridation Rate of Sapphire

MRS Internet Journal of Nitride Semiconductor Research ◽

10.1557/s1092578300002398 ◽

1999 ◽

Vol 4 (S1) ◽

pp. 161-166 ◽

Cited By ~ 7

Author(s):

A.J. Ptak ◽

K.S. Ziemer ◽

M.R. Millecchia ◽

C.D. Stinespring ◽

T.H. Myers

Keyword(s):

Molecular Nitrogen ◽

Active Species ◽

Operating Conditions ◽

Rf Plasma ◽

Atomic Nitrogen ◽

Active Nitrogen ◽

Plasma Sources ◽

Electrostatic Deflector ◽

Low Energy Ions ◽

Operating Regimes

The operating regimes of two rf-plasma sources, an Oxford CARS-25 and an EPI Unibulb, have been extensively characterized. By changing the exit aperture configuration and using an electrostatic deflector, the Oxford source could produce either primarily atomic nitrogen, atomic nitrogen mixed with low energy ions, or a large flux of higher energy ions (>65 eV) as the active species in a background of neutral molecular nitrogen. The EPI source produced a significant flux of metastable molecular nitrogen as the active species with a smaller atomic nitrogen component. Nitridation of sapphire using each source under the various operating conditions indicate that the reactivity was different for each type of active nitrogen. Boron contamination originating from the pyrolytic boron nitride plasma cell liner was observed.

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