top surface imaging
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Al-2.136 Top-Surface Imaging (Tsi)

2021 ◽  
Author(s):  
Richard G. Jones ◽  
Christopher K. Ober ◽  
Teruaki Hayakawa ◽  
Christine K. Luscombe ◽  
Natalie Stingelin
Keyword(s):  
Surface Imaging ◽  
Top Surface Imaging

Top surface imaging study by selective chemisorptions of poly(dimethyl siloxane) on diazoketo-functionalized polymeric surface

2008 ◽  
Author(s):  
Ramakrishnan Ganesan ◽  
Seul Ki Youn ◽  
Jei-Moon Yun ◽  
Jin-Baek Kim
Keyword(s):  
Imaging Study ◽  
Surface Imaging ◽  
Dimethyl Siloxane ◽  
Polymeric Surface ◽  
Top Surface Imaging

Novel Top-Surface Imaging Process by Selective Chemisorption of Poly(dimethyl siloxane) on Diazoketo-Functionalized Single Component Photoresist

2008 ◽  
Vol 29 (5) ◽  
pp. 437-441 ◽  
Author(s):  
Ramakrishnan Ganesan ◽  
Seul-Ki Youn ◽  
Jin-Baek Kim
Keyword(s):  
Single Component ◽  
Surface Imaging ◽  
Dimethyl Siloxane ◽  
Top Surface Imaging

A novel top surface imaging approach utilizing direct-area selective atomic layer deposition of hardmasks

2007 ◽  
Author(s):  
Ashwini Sinha ◽  
Dennis W. Hess ◽  
Clifford L. Henderson
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Surface Imaging ◽  
Layer Deposition ◽  
Imaging Approach ◽  
Top Surface Imaging

Patterning Nanometer Resist Features on Planar and Topography Substrates Using The 2-Step NERIME FIB Top Surface Imaging Process

2006 ◽  
Author(s):  
K. Arshak ◽  
S.F. Gilmartin ◽  
D. Collins ◽  
O. Korostynska ◽  
A. Arshak
Keyword(s):  
Surface Imaging ◽  
Top Surface Imaging

A Top Surface Imaging Method Using Area Selective ALD on Chemically Amplified Polymer Photoresist Films

2006 ◽  
Vol 9 (11) ◽  
pp. G330 ◽  
Author(s):  
Ashwini Sinha ◽  
Dennis W. Hess ◽  
Clifford L. Henderson
Keyword(s):  
Imaging Method ◽  
Surface Imaging ◽  
Chemically Amplified ◽  
Top Surface Imaging

Liquid phase silylation of Shipley SPR500A-series resists using top surface imaging

2003 ◽  
Author(s):  
K. Arshak ◽  
M. Mihov ◽  
A. Arshak ◽  
D. McDonagh ◽  
D. Sutton ◽  
...  
Keyword(s):  
Liquid Phase ◽  
Surface Imaging ◽  
Top Surface Imaging

Negative resist image by dry etching as a novel top surface imaging process for ion-beam lithography

2003 ◽  
Author(s):  
Khalil I. Arshak ◽  
Miroslav Mihov ◽  
Arousian Arshak ◽  
Declan McDonagh ◽  
David Sutton ◽  
...  
Keyword(s):  
Ion Beam ◽  
Dry Etching ◽  
Surface Imaging ◽  
Ion Beam Lithography ◽  
Top Surface Imaging
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