Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling

This study proposes and verifies bipolar electrostatic grippers stacking 3D-printed-layered modules consisting of arrays of elastically deformable bipolar beams. The influence of the mechanical compliance of grippers on the attractive force that it generates is clarified by comparing two types of modules having either high or low mechanical compliances. Experiments measured the attractive force of the gripper and demonstrated the pick-and-place performance of a thin film. The results show that mechanical compliance plays an important role in mitigating the attractive force decrease in stacking modules. The grippers’ ability for thin film handling is demonstrated by observing pick-and-place behaviours of the proposed bipolar electrostatic grippers.

Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application

This study presents a barium titanate (BaTiO3) film-based piezoelectric airflow sensor. This sensor integrated a piezoelectric beam array with a poly(dimethylsiloxane) orifice membrane as the core sensing component. The compact size of the micromachined device fit the requirements for a wearable device. The hydrothermally grown barium titanate film exhibited an orthorhombic crystal structure with good piezoelectric properties. We propose an algorithm to determine the airflow sensor performance using data from the measured piezoelectric signal and the displacement of the piezoelectric beam. This algorithm correlates the discharge coefficient of the core sensing component, Reynold’s number, airflow velocity, pressure difference across the component, displacement of the piezoelectric beam, strain of the barium titanate film, and generated charge from the sensor, which is rarely reported in the literature. The Young’s modulus and piezoelectric constant of the barium titanate film could also be derived as 100 GPa and 8 pC/N, respectively. Utilizing this algorithm and the generated piezoelectric signal of the sensor, important breath parameters of a young male subject at rest were monitored.

Influence of Source Parameters and Non-Kolmogorov Turbulence on Evolution Properties of Radial Phased-Locked Partially Coherent Vortex Beam Array

Partially coherent optical vortices have been applicated widely to reduce the influence of atmospheric turbulence, especially for free-space optical (FSO) communication. Furthermore, the beam array is an effective way to increase the power of the light source, and can increase the propagation distance of the FSO communication system. Herein, we innovatively report evolution properties of the radial phased-locked partially coherent vortex (RPLPCV) beam array in non-Kolmogorov turbulence. The analytical expressions for the cross-spectral density and the average intensity of an RPLPCV beam array propagated through non-Kolmogorov turbulence are obtained. The numerical results reveal that the intensity distribution of the RPLPCV array propagated in the non-Kolmogorov turbulence is gradually converted to a standard Gaussian distribution. In addition, the larger the radial radius, radial number and waist radius are, the smaller the coherence length is. Moreover, the longer the wavelength is, the shorter the propagation distance required for the intensity distribution of the RPLPCV beam array to be converted into a Gaussian distribution in the non-Kolmogorov turbulence. The research in this paper provides a theoretical reference for the selection of light sources and the suppression of turbulence effects in wireless optical communication.