A Novel Polishing Process with Rigid-Flexible Composite Structure Plate and Its Performance in Polishing Sapphire Wafer

A novel flexible polishing process has been developed for sapphire wafer by using a polishing plate with rigid-flexible composite structure to satisfy the demands of excellent surface shape accuracy and high surface topography quality simultaneously. This new polishing plate was fabricated by alternately casting and curing the ring structure of soft and hard unsaturated resins. It is found that the overall stiffness of the polishing plate is improved due to the “hard support frame” of rigid-flexible polishing plate, as well as the ability of removal selectivity of the polishing plate is strengthened. The topography quality and shape accuracy of sapphire wafer polished by presented novel polishing process have been compared with those polished by conventional flexible polishing, respectively. Both experiment and simulation results are shown that the surface roughness and topographical variations of sapphire wafer polished by the novel rigid-flexible composite structure polishing plate have been greatly improved. Comparing with the conventional flexible polishing, the surface shape accuracy of the sapphire wafer polished by the presented novel polishing process can be improved by 54.1%.

A Mathematical Model and Numerical Solution of a Boundary Value Problem for a Multi-Structure Plate

This study examined the deformation problem of a plate system (formed side-by-side) composed of multi-structure plates. It obtained numerical approaches of the transmission conditions on the common border of plates that composed the system. Numerical examples were solved in different boundary and transmission conditions.

PENGEBORAN LEPAS PANTAI

Budi Utomo, in this paper explain that offshore drilling carried out to obtain crude oil through the oil wells. The means that must exist in the operation of offshore drilling is a bridge structure (plate form) as a place to put the drilling equipment. Known two kinds of platforms, that is platforms permanent (fixed) which stands on the feet of reinforced concrete, and the bridge is not fixed like swamp barges, drilling ship (floaters) and jack-up rig. Jack up rig is one of the offshore rigs that have the ability to elevation in accordance with a sea depth of drilling. Drilling equipment is a range of equipment that is prepared in such a way, so that such a drill rod, and all this equipment has a hole inside that allows for fluid or mud circulation. Key word: Drilling equipment

A Valveless Micro Impedance Pump Driven by PZT Actuation

This paper presents the fabrication and preliminary experimental studies of flow performance on a valveless micro impedance pump actuated by the shear mode PZT actuator, a novel method of pumping fluid on the microscale. The micro impedance pump was constructed of three nickel electroforming components, two glass tubes, a PZT actuator and a glass substrate. The three electroforming components include a bottom structure plate, a channel plate and a top structure plate. The AZ-type positive photoresist was used as the electroforming mould, which was patterned by UV lithography. The top and bottom structure plates were aligned and assembled with the channel plate by epoxy adhesive such that a micro channel with a compressible section coupled at both ends to rigid sections of different impedance was formed. A pressure head can be built up to drive flow through the accumulative effects of wave propagation and reflection originating from the periodic PZT excitation, located asymmetrically along the length of the compressible section of the channel. Experimental results showed that the flow was reversible and pressure heads had a highly non-linear dependence on the frequency and amplitude of the excitation. Maximum flow rates of 13 μl min-1 have been achieved with the channel size of 15μm high and 4 mm wide.