The process of dimensional fused silica etching was offered. The production process of molycoat by magnetron sputtering of molybdenum target in inert gas (Argon) on vacuum distillation unit (NIKA-2012 TN) was examined. The coat quality (delamination, discontinuity) was analyzed; the influence of the first kind internal strains on the type of the observed defects was determined. The research was conducted by means of microscopic and X-ray diffraction analysis. It has been established that the internal strain value in the coat depends on the sputtering gas (Argon) flow rate, and, consequently, its pressure in the magnetron system for molybdenum sputtering. Zero stresses are registered under Argon's flow rate, which is 7.5 L/h. Influence of internal stresses level in the barrier coating on the quality of etching dimple.