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Characterization of laser induced damage of HR coatings with picosecond pulses

2017 ◽  
Author(s):  
Cui Yun ◽  
Yuan'an Zhao ◽  
Cheng Fu Li ◽  
Yueliang Wang ◽  
Peng Xiaocong ◽  
...  
Keyword(s):  
Picosecond Pulses ◽  
Laser Induced Damage ◽  
Hr Coatings

High-Reflectance Coatings at 193nm

2013 ◽  
Vol 631-632 ◽  
pp. 110-115
Author(s):  
Jian Sun ◽  
Wei Li Zhang ◽  
Kui Yi ◽  
Jian Da Shao
Keyword(s):  
Mechanical Properties ◽  
Laser System ◽  
Practical Application ◽  
Scattering Loss ◽  
Steep Rise ◽  
Micro Cracks ◽  
Excellent Candidate ◽  
Optical And Mechanical Properties ◽  
Hr Coatings ◽  
High Reflectance

As an important component in 193nm laser system, high-reflectance (HR) coatings with excellent optical and mechanical properties are needed urgently. In this study, we designed and produced three different HR coatings at 193nm, Al2O3/ AlF3 coating, LaF3/ AlF3 coating and a double stack mirror with combination of Al2O3/ AlF3 and LaF3/ AlF3. With 14 layer pairs, the reflectance of Al2O3/ AlF3 coating could reach 98% which could not get higher duo to the absorption of Al2O3. The reflectance of LaF3/ AlF3 coatings could achieve 98.13% with 15 layer pairs. When the layer pair increased to 16, the reflectance lessened ascribed to steep rise in scattering loss caused by micro-cracks occurred in the coatings. A mirror with combination of Al2O3/ AlF3 and LaF3/ AlF3 could obtain the reflectance of 98.78% as deposited. Even 4 months later the value could still reach 98.47% which was an excellent candidate for practical application.

Database on damage thresholds of picoseconds pulse for HR coatings

2011 ◽  
Author(s):  
Shinji Motokoshi ◽  
Kota Kato ◽  
Tomohiro Somekawa ◽  
Katsuhiro Mikami ◽  
Eiji Sato ◽  
...  
Keyword(s):  
Hr Coatings

Database on laser-induced damage thresholds for AR and HR coatings in Japan

2010 ◽  
Author(s):  
Shinji Motokoshi ◽  
Katsuhiro Mikami ◽  
Kota Kato
Keyword(s):  
Laser Induced Damage ◽  
Hr Coatings

High Threshold HR Coatings at 1064 nm

2009 ◽  
pp. 247-247-8
Author(s):  
F Rainer ◽  
FP De Marco ◽  
JT Hunt ◽  
AJ Morgan ◽  
LP Mott ◽  
...  
Keyword(s):  
High Threshold ◽  
Hr Coatings

Morphology and Laser Damage Studies by Atomic Force Microscopy of E-Beam Evaporation Deposited AR and HR Coatings

2009 ◽  
pp. 228-228-9
Author(s):  
AA Tesar ◽  
M Balooch ◽  
KW Shotts ◽  
WJ Siekhaus
Keyword(s):  
Atomic Force Microscopy ◽  
Laser Damage ◽  
Force Microscopy ◽  
Atomic Force ◽  
Hr Coatings

Measurement of HR Coatings Absorptance at 10.6 Microns by Mirage Effect

2009 ◽  
pp. 320-320-8
Author(s):  
PJ Baron ◽  
A Culoma ◽  
AC Boccara ◽  
D Fournier
Keyword(s):  
Mirage Effect ◽  
Hr Coatings

HR Coatings Prepared from Colloidal Suspensions

2009 ◽  
pp. 286-286-4 ◽  
Author(s):  
IM Thomas ◽  
JG Wilder ◽  
RP Gonzales
Keyword(s):  
Colloidal Suspensions ◽  
Hr Coatings

Low-loss HR coatings on fused silica substrates for 193 nm micro-lithography applications

2008 ◽  
Author(s):  
Sven Laux ◽  
Helmut Bernitzki ◽  
Dieter Fasold ◽  
Michael Klaus ◽  
Uwe Schuhmann
Keyword(s):  
Fused Silica ◽  
Low Loss ◽  
Hr Coatings ◽  
193 Nm ◽  
Silica Substrates
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