The Measurement of Liquid Surface Tension by Optical Technique

Based on the laser technique, a method of detecting liquid surface tension was proposed. The relation between the laser diffraction pattern and liquid surface tension is derived. In this experiment, laser diffraction patterns from liquid surface waves were collected .The experiment results show that the proposed way is feasible.

Fabrication and Precise Alignment of Electron Lenses in the Microcolumn Using the Laser Diffraction Pattern

The quality of electron lenses and precision of their alignment are very important factors that determine the resolution of the microcolumn. In this work, we have fabricated the quality electron lenses using the semiconductor processing technologies and checked their circular shapes by using the laser diffraction pattern. The observed diffraction pattern by naked eyes was the circular Airy disk and the measured eccentricity of the lens aperture was found to be less than 0.02. We have also made precise alignment of the electron lenses by illuminating the laser beam through the roughly aligned electron lenses and adjusting the electron lenses while monitoring the diffraction pattern formed by the diffracted laser light from the lens apertures. This new method can replace the conventional alignment method where the expensive equipment like the aligner or the STM is required. We have also found the misalignment limit by measuring the e-beam current that came out from the microcolumn.

Study on the Precise Alignment of Micro-Lenses in the Microcolumn by Using the Laser Diffraction Pattern

The alignment precision of the electron lenses is one of the most critical factors that determine overall performance of the microcolumn system including the image resolution and aberration. Since the lens apertures are usually as small as 5 ~ 300 μm, the alignment is difficult to carry out, even if the expensive and complicated aligner is used. In this work, we have developed a novel alignment method using laser diffraction pattern, with which we can easily obtain high-precision alignment. The images of Cu grid (mesh# 1000) and carbon nanotubes (200-nm diameter) taken by the microcolumn fabricated by the new alignment scheme has confirmed that the new method was very simple and useful.