For the development of miniaturized force sensors, built up in ceramics technology with piezo-resistive principle, the compatibility of the piezo-resistive thick-film paste with the substrate and termination paste has to be verified. This paper deals with the compatibility of the ESL 3414-A piezo-resistive paste on HTCC (high temperature co-fired ceramics) substrates (alumina as reference and the partially stabilized zirconia tape ESL 42013-A) as well as on LTCC (low temperature co-fired ceramics) substrates (Heraeus AHT01-005, AHT08-047, CT707; and CeramTec GC) under different manufacturing conditions. The sheet resistance at room temperature, the longitudinal gauge factor at room temperature and the temperature coefficient of resistance have been measured. The results are compared with microscope images showing cracks in distinct cases. Finally, the compatibility and thus applicability of the ESL 3414-A on the investigated substrates is evaluated.