A test structure to separately analyze CMOSFET reliabilities around center and edge along the channel width

Author(s):  
T. Ohzone ◽  
E. Ishii ◽  
T. Morishita ◽  
K. Komoku ◽  
T. Matsuda ◽  
...  
Keyword(s):  
2007 ◽  
Vol E90-C (2) ◽  
pp. 515-522
Author(s):  
T. OHZONE ◽  
E. ISHII ◽  
T. MORISHITA ◽  
K. KOMOKU ◽  
T. MATSUDA ◽  
...  
Keyword(s):  

2014 ◽  
Vol E97.C (11) ◽  
pp. 1117-1123 ◽  
Author(s):  
Katsuhiro TSUJI ◽  
Kazuo TERADA ◽  
Ryota KIKUCHI

Author(s):  
P. Larré ◽  
H. Tupin ◽  
C. Charles ◽  
R.H. Newton ◽  
A. Reverdy

Abstract As technology nodes continue to shrink, resistive opens have become increasingly difficult to detect using conventional methods such as AVC and PVC. The failure isolation method, Electron Beam Absorbed Current (EBAC) Imaging has recently become the preferred method in failure analysis labs for fast and highly accurate detection of resistive opens and shorts on a number of structures. This paper presents a case study using a two nanoprobe EBAC technique on a 28nm node test structure. This technique pinpointed the fail and allowed direct TEM lamella.


Author(s):  
Jeffery P. Huynh ◽  
Joseph P. Shannon ◽  
Richard W. Johnson ◽  
Mike Santana ◽  
Thomas Y. Chu ◽  
...  

Abstract Modifications directly to a transistor’s source/drain and polysilicon gate through the backside of a SOI device were made. Contact resistance data was obtained by creating contacts through the buried oxide layer of a manufactured test structure. A ring oscillator circuit was modified and the shift in oscillator frequency was measured. Finally, cross section images of the FIB created contacts were presented in the paper to illustrate the entire process.


2017 ◽  
Author(s):  
Kathryn Grace De Rego ◽  
◽  
Brett Eaton ◽  
J. Wesley Lauer ◽  
Marwan Hassan

2004 ◽  
Vol T114 ◽  
pp. 202-204
Author(s):  
SooJeong Park ◽  
Kook Chul Moon ◽  
MoonYoung Shin ◽  
MinKoo Han

2014 ◽  
Vol 35 (2) ◽  
pp. 178-180 ◽  
Author(s):  
Wenjie Lu ◽  
Alex Guo ◽  
Alon Vardi ◽  
Jesus A. del Alamo

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Farideh Haghighi ◽  
Zahra Talebpour ◽  
Amir Sanati-Nezhad

AbstractFlow distributor located at the beginning of the micromachined pillar array column (PAC) has significant roles in uniform distribution of flow through separation channels and thus separation efficiency. Chip manufacturing artifacts, contaminated solvents, and complex matrix of samples may contribute to clogging of the microfabricated channels, affect the distribution of the sample, and alter the performance of both natural and engineered systems. An even fluid distribution must be achieved cross-sectionally through careful design of flow distributors and minimizing the sensitivity to clogging in order to reach satisfactory separation efficiency. Given the difficulty to investigate experimentally a high number of clogging conditions and geometries, this work exploits a computational fluid dynamic model to investigate the effect of various design parameters on the performance of flow distributors in equally spreading the flow along the separation channels in the presence of different degrees of clogging. An array of radially elongated hexagonal pillars was selected for the separation channel (column). The design parameters include channel width, distributor width, aspect ratio of the pillars, and number of contact zone rows. The performance of known flow distributors, including bifurcating (BF), radially interconnected (RI), and recently introduced mixed-mode (MMI) in addition to two new distributors designed in this work (MMII and MMIII) were investigated in terms of mean elution time, volumetric variance, asymmetry factors, and pressure drop between the inlet and the monitor line for each design. The results show that except for pressure drop, the channel width and aspect ratio of the pillars has no significant influence on flow distribution pattern in non-clogged distributors. However, the behavior of flow distributors in response to clogging was found to be dependent on width of the channels. Also increasing the distributor width and number of contact zone rows after the first splitting stage showed no improvement in the ability to alleviate the clogging. MMI distributor with the channel width of 3 µm, aspect ratio of the pillars equal to 20, number of exits of 8, and number of contact zones of 3 exhibited the highest stability and minimum sensitivity to different degrees of clogging.


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