Comparison of optical and electrical measurement techniques for CD metrology on alternating aperture phase-shifting masks

2006 ◽  
Author(s):  
S. Smith ◽  
A. Tsiamis ◽  
M. McCallum ◽  
A.C. Hourd ◽  
J.T.M. Stevenson ◽  
...  
Keyword(s):  
Measurement Techniques ◽  
Electrical Measurement ◽  
Phase Shifting

Investigation of Heterogeneous Mixtures With Dual-Modality Transducers Fabricated Using Thick-Film Technology

Volume 1 ◽  
2004 ◽  
Author(s):  
Guangtian Meng ◽  
Artur J. Jaworski ◽  
T. Dyakowski ◽  
J. M. Hale ◽  
N. M. White
Keyword(s):  
Thick Film ◽  
Speed Of Sound ◽  
Volume Fraction ◽  
Measurement Techniques ◽  
Electrical Measurement ◽  
Experimental Results ◽  
Process Conditions ◽  
Dual Modality ◽  
Theoretical Predictions ◽  
Thick Film Technology

The work presented in this paper focuses on development of a dual modality sensor, for deployment within an oil and gas extraction plant to measure the composition of oil-water mixtures. The sensors combine ultrasonic and electrical measurement techniques. These are of course non-destructive, rapid, and can potentially provide an on-line industrial measurement. In addition, the combination of two techniques could potentially be reliable in a wider range of process conditions and could contain self-calibration features. The sensors used in the current study were manufactured using thick-film technology, which enables construction of multilayered structures of both conductive and non-conductive layers, some of which may exhibit piezoelectric properties for ultrasonic measurement purposes. These are later fired on a ceramic substrate to provide rugged sensors, capable of working in aggressive industrial environments. Experiments were conducted for mixtures of vegetable oil and saline water to investigate the feasibility of such dual dual-modality sensors. The time of flight of ultrasonic wave in pure liquids and heterogeneous mixtures was measured. It has been shown that the signal obtained from the transducers is sufficiently strong to warrant the measurement of the speed of sound in heterogeneous mixtures of oil and water. A study of the effects of oil concentration and temperature on the speed of sound has been conducted. A mathematical model has been tested, which relates the speed of sound to the volume fraction taking into account the reflection and refraction on the droplet interfaces. The experimental results subjected to linear regression agree very well with the theoretical predictions. The electrical measurement was conducted at three different frequencies. In general, the values of capacitance and conductance decrease with increasing oil percentage. In the middle oil percentages a discontinuity occurs in the decreasing trend. In the high oil percentages, the experimental results agree very well with theoretical predictions.

Investigation Of Microplasma Breakdown In 4H Silicon Carbide

1998 ◽  
Vol 512 ◽  
Author(s):  
Uwe Zimmermann ◽  
Anders Hallén ◽  
Andrey O. Konstantinov ◽  
Bo Breitholtz
Keyword(s):  
Silicon Carbide ◽  
Breakdown Voltage ◽  
Reverse Bias ◽  
Measurement Techniques ◽  
Electrical Measurement ◽  
Parallel Plane ◽  
Turn On ◽  
Forward Current ◽  
Current Densities ◽  
Microplasma Breakdown

ABSTRACTReverse bias breakdown behaviour of high quality 4H silicon carbide p-n diodes was investigated, using optical and electrical measurement techniques. Most of the sample diodes suffered from early breakdown phenomena in the form of microplasmas at about 80% of the calculated parallel plane breakdown voltage for the diodes, as evident from measured I-V curves. A group of these microplasmas could be correlated to micropipes, identified by optical microscopy, while a large number of microplasmas were caused by other defects and inhomogenities in the space charge region under reverse bias. The same spots that revealed early breakdown phenomena under reverse bias also showed a different electroluminescence (EL) behaviour under low forward current densities compared to those areas with a homogeneous breakdown behaviour. However, even diodes containing one or more micropipes in the region of the junction showed good rectifying behaviour up to two third of the parallel plane breakdown voltage, where the turn-on of a microplasma was observed.

scholarly journals Probing timescales during back side ablation of Molybdenum thin films with optical and electrical measurement techniques

2013 ◽  
Vol 21 (14) ◽  
pp. 16431 ◽  
Author(s):  
D. Bartl ◽  
M. Ametowobla ◽  
F. Schmid ◽  
A. Letsch ◽  
M. Hafner ◽  
...  
Keyword(s):  
Thin Films ◽  
Measurement Techniques ◽  
Electrical Measurement ◽  
Back Side

Recent Refinements and Developments in Kerr System Electrical Measurement Techniques

1972 ◽  
Vol 21 (4) ◽  
pp. 504-510 ◽  
Author(s):  
Esther Christmas Cassidy ◽  
William E. Anderson ◽  
Stanley R. Booker
Keyword(s):  
Measurement Techniques ◽  
Electrical Measurement

scholarly journals SYNTHESIS AND CHARACTERIZATION STUDY OF HGXCR2-X S4 COMPOSITE THIN FILMS PREPARED BY CHEMICAL BATH DEPOSITION TECHNIQUE

2021 ◽  
Vol 9 (4) ◽  
pp. 757-763
Author(s):  
Harishchandra B. Patil ◽  
◽  
Rajendrakumar B. Ahirrao ◽  
Vijay N. Pawar ◽  
◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Bath Deposition ◽  
Measurement Techniques ◽  
Bath Temperature ◽  
Electrical Measurement ◽  
Scanning Electron Micrographs ◽  
Glass Substrates ◽  
Characterization Study ◽  
Diffraction Patterns ◽  
Power Measurements

The ternary thin films of composite HgxCr2-xS4 (x = 0.6) have been deposited by simple chemical bath deposition (CBD) technique on glass substrate. The thin films have been deposited at optimized conditions pH at 10 0.1, bath temperature 650C, deposition time 120 minutes. The films were uniform and adherent to glass substrates. They were characterized by structural, optical, and electrical measurement techniques. According to their X-ray diffraction patterns HgxCr2-xS4(x = 0.6) films are crystalline with band gap of 2.4 eV. Scanning electron micrographs showed that the substrates were well covered with films no cracks or pinholes were observed. The electrical resistivity of the films is found to be 1.3703 x 103 Ω-cm to 2.1243 x 103 Ω-cm at temperature range 3030k to 4230K. According to thermoelectric power measurements HgxCr2-xS4(x = 0.6) thin films are of n-type nature.

In-situ electrical and spectroscopical techniques for the study of degradation mechanisms and life time prediction of organic based electronic material systems

2003 ◽  
Vol 769 ◽  
Author(s):  
Jean Manca ◽  
Ludwig Goris ◽  
Els Kesters ◽  
Laurence Lutsen ◽  
Tom Martens ◽  
...  
Keyword(s):  
Measurement Techniques ◽  
Analytical Techniques ◽  
Life Time ◽  
Electrical Measurement ◽  
Degradation Mechanisms ◽  
Plastic Electronics ◽  
In Situ Techniques ◽  
Material Systems ◽  
Early Failures

AbstractIn order to tailor the synthesis of new robust organic materials for electronic applications and to guarantee the required life time for the emerging commercial plastic electronic applications it is of key importance to understand the underlying degradation mechanisms. Since plastic electronics is a rather young technology introducing new material systems, its reliability is characterized by new failure and degradation mechanisms, a relatively high amount of early failures and multi-modal failure distributions. To understand the mechanism responsible for a given failure or degradation mode, it is essential to study it separately, through appropriate test structures and test techniques. Powerful techniques for this purpose are a.o. analytical techniques (SEM, TEM, SPM,…), in-situ electrical measurement techniques and spectroscopical techniques (in-situ FTIR, in-situ UV-Vis, PDS). The benefits of these in-situ techniques in the reliability study of organic based electronics will be illustrated in this contribution.

Sign in / Sign up

Export Citation Format

Share Document