2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC)
Latest Publications

TOTAL DOCUMENTS

85
(FIVE YEARS 0)

H-INDEX

7
(FIVE YEARS 0)

Published By IEEE

9781509003860
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Post porosity plasma protection integration at 48 nm pitch

2016 ◽  
Author(s):  
Huai Huang ◽  
Krystelle Lionti ◽  
Willi Volksen ◽  
Terry Spooner ◽  
Hosadurga Shobha ◽  
...  

Spin-based interconnect technology and design

2016 ◽  
Author(s):  
Azad Naeemi ◽  
Sou-Chi Chang ◽  
Sourav Dutta ◽  
Chenyun Pan ◽  
Sasikanth Manipatruni ◽  
...  
Keyword(s):  
Interconnect Technology ◽  
Technology And Design

Toward successful integration of gap-filling ultralow-k dielectrics

2016 ◽  
Author(s):  
L. Zhang ◽  
J.-F. de Marneffe ◽  
A. Lesniewska ◽  
P. Verdonck ◽  
N. Heylen ◽  
...  
Keyword(s):  
Gap Filling ◽  
Successful Integration
Load More ...
Sign in / Sign up

Export Citation Format

Share Document