Ion Implantation in Semiconductors 1976
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9781461341987, 9781461341963
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Defects Introduced into Silicon by Boron Implantation in the MeV Energy Range

1977 ◽  
pp. 65-75
Author(s):  
J. C. Muller ◽  
R. Stuck ◽  
P. Siffert ◽  
S. Kalbitzer
Keyword(s):  
Energy Range ◽  
Boron Implantation

Heavy Ion Ranges in Silicon and Aluminium

1977 ◽  
pp. 693-702
Author(s):  
W. A. Grant ◽  
D. Dodds ◽  
J. S. Williams ◽  
C. E. Christodoulides ◽  
R. A. Baragiola ◽  
...  
Keyword(s):  
Heavy Ion ◽  
Ion Ranges

High Dose Implantation of Au and Cu into Si Studied by Auger Electron and Backscattering Spectroscopies

1977 ◽  
pp. 57-64
Author(s):  
A. Hiraki ◽  
M. Iwami ◽  
K. Shuto ◽  
T. Saegusa ◽  
T. Narusawa ◽  
...  
Keyword(s):  
Auger Electron ◽  
High Dose ◽  
High Dose Implantation

Ag-Ion Implantation into ZnSe

1977 ◽  
pp. 621-628
Author(s):  
D. H. Haberland ◽  
H. Nelkowski ◽  
W. Schlaak
Keyword(s):  
Ion Implantation

Formation of New Radiative Recombination Center in AlxGal-xAs by Nitrogen-Ion Implantation

1977 ◽  
pp. 575-583
Author(s):  
Y. Makita ◽  
S. Gonda ◽  
H. Tanoue ◽  
T. Tsurushima
Keyword(s):  
Ion Implantation ◽  
Radiative Recombination ◽  
Recombination Center ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

Enhanced and Inhibited Oxidation of Implanted Silicon

1977 ◽  
pp. 49-56 ◽  
Author(s):  
G. Mezey ◽  
T. Nagy ◽  
J. Gyulai ◽  
E. Kotai ◽  
A. Manuaba ◽  
...  
Keyword(s):  
Inhibited Oxidation

Sb+-Implanted Buried Layer Beneath Thick Oxide Applied for Vertical Fet

1977 ◽  
pp. 535-542
Author(s):  
Y. Akasaka ◽  
K. Horie ◽  
G. Mitarai ◽  
Y. Hirose ◽  
K. Nomura ◽  
...  
Keyword(s):  
Buried Layer

Dependence of Residual Damage in “Through-Oxide” Implants on Substrate Orientation and Anneal Sequence

1977 ◽  
pp. 511-517
Author(s):  
E. F. Kennedy ◽  
L. Csepregi ◽  
J. W. Mayer ◽  
T. W. Sigmon
Keyword(s):  
Substrate Orientation ◽  
Residual Damage
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