Sb+-Implanted Buried Layer Beneath Thick Oxide Applied for Vertical Fet

Author(s):  
Y. Akasaka ◽  
K. Horie ◽  
G. Mitarai ◽  
Y. Hirose ◽  
K. Nomura ◽  
...  
Keyword(s):  
2013 ◽  
Vol 20 (9) ◽  
pp. 093109 ◽  
Author(s):  
L. G. Huang ◽  
M. Bussmann ◽  
T. Kluge ◽  
A. L. Lei ◽  
W. Yu ◽  
...  

2008 ◽  
Vol 55 (1) ◽  
pp. 435-445 ◽  
Author(s):  
Benoit Bakeroot ◽  
Jan Doutreloigne ◽  
Piet Vanmeerbeek ◽  
Peter Moens
Keyword(s):  

Author(s):  
Paul Patruno ◽  
Marek Kostrzewa ◽  
Karine Landry ◽  
Weize Xiong ◽  
C. Rinn Cleavelin ◽  
...  

1994 ◽  
Vol 37 (7) ◽  
pp. 1383-1385 ◽  
Author(s):  
Ming-Jiang Zhou ◽  
A. Van Calster

2018 ◽  
Vol 10 ◽  
pp. 46-54 ◽  
Author(s):  
Qi Li ◽  
Yi Wen ◽  
Fabi Zhang ◽  
Haiou Li ◽  
Gongli Xiao ◽  
...  
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document