Sb+-Implanted Buried Layer Beneath Thick Oxide Applied for Vertical Fet
Keyword(s):
2005 ◽
Vol 22
(12)
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pp. 1264-1273
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Keyword(s):
2008 ◽
Vol 55
(1)
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pp. 435-445
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1994 ◽
Vol 37
(7)
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pp. 1383-1385
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