2017 China Semiconductor Technology International Conference (CSTIC)
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180
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2
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Published By IEEE

9781509066940
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Buffer-optimized improvement in RF loss of AlGaN/GaN HEMTs on 4-inch silicon (111)

2017 ◽  
Author(s):  
Tien Tung Luong ◽  
Franky Lumbantoruan ◽  
Yen-Yu Chen ◽  
Yen-Teng Ho ◽  
Yueh-Chin Lin ◽  
...  
Keyword(s):  
Gan Hemts ◽  
Rf Loss

Fail mechanism of program disturbance for erase cells VT positive shift in NAND flash technology

2017 ◽  
Author(s):  
Chunmei Zou ◽  
Yong Zhao ◽  
Wei-Ting Kary Chien ◽  
Junyao Tang
Keyword(s):  
Nand Flash ◽  
Positive Shift

A fast and low-cost TSV/TGV filling method

2017 ◽  
Author(s):  
Jiebin Gu ◽  
Bingjie Liu ◽  
Heng Yang ◽  
Xinxin Li
Keyword(s):  
Low Cost ◽  
Filling Method

Effective method to automatically measure the profile parameters of integrated circuit from SEM/TEM/STEM images

2017 ◽  
Author(s):  
Xiaolin Zhang ◽  
Zubiao Fu ◽  
Yi Huang ◽  
Alien Lin ◽  
Yaoming Shi ◽  
...  
Keyword(s):  
Integrated Circuit

Research of SMO process to improve the imaging capability of lithography system for 28nm node and beyond

2017 ◽  
Author(s):  
Haibin Yu ◽  
Yueyu Zhang ◽  
Binjie Jiang ◽  
Shirui Yu ◽  
Zhibiao Mao
Keyword(s):  
Imaging Capability ◽  
Lithography System

A study of AA CD uniformity loading optimization at 28nm node

2017 ◽  
Author(s):  
YiZheng Zhu ◽  
Lian Lu ◽  
Fuhong Chen ◽  
Sifei Chan ◽  
Quanbo Li ◽  
...  

A novel FMEA tool application in semiconductor manufacture

2017 ◽  
Author(s):  
Lijuan Sun ◽  
Liping Peng ◽  
Guihong Deng ◽  
Kary Chien

14nm metal gate film stack development and challenges

2017 ◽  
Author(s):  
Jianhua Xu ◽  
Anni Wang ◽  
Jun He ◽  
Xuezhen Jing ◽  
Ziying Zhang ◽  
...  
Keyword(s):  
Metal Gate
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