2017 China Semiconductor Technology International Conference (CSTIC)
Latest Publications

TOTAL DOCUMENTS

180

(FIVE YEARS 0)

H-INDEX

2

(FIVE YEARS 0)

Published By IEEE

9781509066940

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A fast and low-cost TSV/TGV filling method

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919862 ◽

2017 ◽

Author(s):

Jiebin Gu ◽

Bingjie Liu ◽

Heng Yang ◽

Xinxin Li

Keyword(s):

Low Cost ◽

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Effective method to automatically measure the profile parameters of integrated circuit from SEM/TEM/STEM images

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919843 ◽

2017 ◽

Author(s):

Xiaolin Zhang ◽

Zubiao Fu ◽

Yi Huang ◽

Alien Lin ◽

Yaoming Shi ◽

...

Keyword(s):

Integrated Circuit

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Research of SMO process to improve the imaging capability of lithography system for 28nm node and beyond

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919754 ◽

2017 ◽

Author(s):

Haibin Yu ◽

Yueyu Zhang ◽

Binjie Jiang ◽

Shirui Yu ◽

Zhibiao Mao

Keyword(s):

Imaging Capability ◽

Lithography System

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MOSFET RF performance improvement through spacer profile optimization for 28nm Poly/SiON SoC technology

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919740 ◽

2017 ◽

Author(s):

Hai Liu ◽

River He ◽

Byunghak Lee

Keyword(s):

Performance Improvement ◽

Profile Optimization ◽

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Buffer-optimized improvement in RF loss of AlGaN/GaN HEMTs on 4-inch silicon (111)

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919884 ◽

2017 ◽

Author(s):

Tien Tung Luong ◽

Franky Lumbantoruan ◽

Yen-Yu Chen ◽

Yen-Teng Ho ◽

Yueh-Chin Lin ◽

...

Keyword(s):

Gan Hemts ◽

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Fail mechanism of program disturbance for erase cells VT positive shift in NAND flash technology

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919835 ◽

2017 ◽

Author(s):

Chunmei Zou ◽

Yong Zhao ◽

Wei-Ting Kary Chien ◽

Junyao Tang

Keyword(s):

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A study on problem solving strategy using experiment of design

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919831 ◽

2017 ◽

Author(s):

Xinyuan Ji ◽

Sheng Kang

Keyword(s):

Problem Solving ◽

Problem Solving Strategy ◽

Solving Strategy

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Dry plasma cleaning by advanced HDRF technology (High Density Radical Flux)

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919794 ◽

2017 ◽

Author(s):

Yannick Pilloux

Keyword(s):

High Density ◽

Plasma Cleaning

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Practical wafer Level Threshold Voltage Stability measurement methodology for the fast evaluation of Flash technology

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919852 ◽

2017 ◽

Author(s):

Gang Niu ◽

Wei-Ting Kary Chien ◽

Jack Chen ◽

Dennis Zhang ◽

Susie Yu ◽

...

Keyword(s):

Threshold Voltage ◽

Voltage Stability ◽

Wafer Level ◽

Fast Evaluation ◽

Stability Measurement ◽

Measurement Methodology

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Stress control metrology in epitaxy

2017 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2017.7919836 ◽

2017 ◽

Author(s):

Yang Song ◽

Pengwei Fan ◽

Yi-Shi Lin

Keyword(s):

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