Research of SMO process to improve the imaging capability of lithography system for 28nm node and beyond

Author(s):  
Haibin Yu ◽  
Yueyu Zhang ◽  
Binjie Jiang ◽  
Shirui Yu ◽  
Zhibiao Mao
Author(s):  
Deepak Goyal

Abstract Next generation assembly/package development challenges are primarily increased interconnect complexity and density with ever shorter development time. The results of this trend present some distinct challenges for the analytical tools/techniques to support this technical roadmap. The key challenge in the analytical tools/techniques is the development of non-destructive imaging for improved time to information. This paper will present the key drivers for the non-destructive imaging, results of literature search and evaluation of key analytical techniques currently available. Based on these studies requirements of a 3D imaging capability will be discussed. Critical breakthroughs required for development of such a capability are also summarized.


1992 ◽  
Author(s):  
Miyoko Noguchi ◽  
Masato Muraki ◽  
Yuichi Iwasaki ◽  
Akiyoshi Suzuki

1999 ◽  
Vol 46 (1-4) ◽  
pp. 469-472 ◽  
Author(s):  
Y. Lee ◽  
R.A. Gough ◽  
T.J. King ◽  
Q. Ji ◽  
K.N. Leung ◽  
...  

2002 ◽  
Vol 17 (12n13) ◽  
pp. 1799-1808 ◽  
Author(s):  
MARCO TAVANI

Gamma-ray astrophysics in the energy range between 30 MeV and 30 GeV is in desperate need of arcminute angular resolution and source monitoring capability. The AGILE Mission planned to be operational in 2004-2006 will be the only space mission entirely dedicated to gamma-ray astrophysics above 30 MeV. The main characteristics of AGILE are the simultaneous X-ray and gamma-ray imaging capability (reaching arcminute resolution) and excellent gamma-ray timing (10-100 microseconds). AGILE scientific program will emphasize a quick response to gamma-ray transients and multiwavelength studies of gamma-ray sources.


1999 ◽  
Author(s):  
Hitoshi Takemura ◽  
Tadashi Komagata ◽  
Yasutoshi Nakagawa ◽  
Kazumitsu Tanaka
Keyword(s):  

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