2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682)
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scholarly journals Micromachined polarization beam splitters for the visible spectrum

2004 ◽  
Author(s):  
K. Gupta ◽  
H. Choo ◽  
H. Kim ◽  
R.S. Muller
Keyword(s):  
Visible Spectrum ◽  
Beam Splitters

Characteristics of 1D and 2D optical scanning epi-Si-mirror devices

2004 ◽  
Author(s):  
Chun-Kai Liu ◽  
Chengkuo Lee ◽  
Chun Ren Cheng ◽  
Yi-Mou Huang ◽  
Shih-Yun Hung ◽  
...  
Keyword(s):  
Optical Scanning

Torsional mirror with X-shaped cross-sectional torsional beam

2004 ◽  
Author(s):  
S. Yasuda ◽  
T. Kato ◽  
K. Torashima ◽  
Y. Shimada ◽  
T. Yagi
Keyword(s):  
Cross Sectional ◽  
Torsional Beam

scholarly journals Electrostatically actuated micro-fluidic optical cross-connect switch

2004 ◽  
Author(s):  
E. Ollier ◽  
C. Divoux ◽  
J. Margail ◽  
T. Enot ◽  
L. Ortiz ◽  
...  
Keyword(s):  
Electrostatically Actuated ◽  
Optical Cross Connect ◽  
Cross Connect

A multi-step DRIE process for a 128 × 128 micromirror array

2004 ◽  
Author(s):  
N. Kouma ◽  
O. Tsuboi ◽  
Y. Mizuno ◽  
H. Okuda ◽  
X. Mi ◽  
...  
Keyword(s):  
Micromirror Array

scholarly journals Micro-sized spectrometer based on a lamellar grating interferometer

2004 ◽  
Author(s):  
O. Manzardo ◽  
R. Michaely ◽  
F. Schadelin ◽  
H.P. Herzig
Keyword(s):  
Grating Interferometer
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