A multi-step DRIE process for a 128 × 128 micromirror array

2004 ◽  
Author(s):  
N. Kouma ◽  
O. Tsuboi ◽  
Y. Mizuno ◽  
H. Okuda ◽  
X. Mi ◽  
...  
Keyword(s):  
Micromirror Array

Advancements in the Micromirror Array Projector Technology

2003 ◽  
Author(s):  
D. B. Beasley ◽  
Matt Bender ◽  
Jay Crosby ◽  
Tim Messer ◽  
Daniel A. Saylor
Keyword(s):  
Micromirror Array

Design and simulation of a micromirror array for a projection TV

1999 ◽  
Author(s):  
Bumkyoo Choi ◽  
Junghoon Lee ◽  
Kyuwon Jung ◽  
Hyungjae Shin
Keyword(s):  
Micromirror Array

High-Density Through-Wafer Electrical Interconnects in Pyrex Substrate Integrated With Micromirror Array

2003 ◽  
Author(s):  
C. C. Wang ◽  
T. D. Kudrle ◽  
M. Bancu ◽  
J. Hsiao ◽  
C. H. Mastrangelo
Keyword(s):  
Flip Chip ◽  
High Density ◽  
Anodic Bonding ◽  
Thermal Coefficient ◽  
Electrical Interconnects ◽  
Via Holes ◽  
Multiple Levels ◽  
Micromirror Array

A method for the construction of high density (2.4 mm−2) vertical leads through a pyrex substrate is presented. The pyrex substrate behaves as a TCE (Thermal Coefficient of Expansion) matched interposer that permits anodic bonding of silicon micromirrors on one side and flip-chip bumping of multiplexing electronic chips on its opposite side. Electrical leads consist of 250±25 μm-diameter holes formed by AJM machining and coated with evaporated Au yielding via resistances of 0.5–0.7 Ω. The via holes are sealed with a new spin-cast polyimide tenting process that enables the subsequent patterning of multiple levels of metal using conventional lithographic techniques.

Double-sided scanning micromirror array for autostereoscopic display

2007 ◽  
Vol 135 (1) ◽  
pp. 80-85 ◽  
Author(s):  
A. Nakai ◽  
K. Hoshino ◽  
K. Matsumoto ◽  
I. Shimoyama
Keyword(s):  
Autostereoscopic Display ◽  
Micromirror Array

Illumination Mode Conversion System Design Based on Micromirror Array in Lithography

2015 ◽  
Vol 35 (11) ◽  
pp. 1111002
Author(s):  
邢莎莎 Xing Shasha ◽  
冉英华 Ran Yinghua ◽  
江海波 Jiang Haibo ◽  
邢廷文 Xing Tingwen
Keyword(s):  
System Design ◽  
Mode Conversion ◽  
Conversion System ◽  
Illumination Mode ◽  
Micromirror Array

scholarly journals Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Jan Kappa ◽  
Dominik Sokoluk ◽  
Steffen Klingel ◽  
Corey Shemelya ◽  
Egbert Oesterschulze ◽  
...  
Keyword(s):  
Light Modulation ◽  
Terahertz Waves ◽  
Spatial Light Modulation ◽  
Micromirror Array

Line-addressable digital-deflection programmable micromirror array

2004 ◽  
Vol 29 (22) ◽  
pp. 2581 ◽  
Author(s):  
Guangya Zhou ◽  
VJ Logeeswaran ◽  
Fook Siong Chau ◽  
Francis E. H. Tay
Keyword(s):  
Micromirror Array

Mechanical design and system-lever analysis of a novel micromirror array

2009 ◽  
Author(s):  
Quan Sun ◽  
Ming Cai ◽  
Ningyuan Wang ◽  
Edmond Cretu
Keyword(s):  
Mechanical Design ◽  
Micromirror Array

Protein patterning by virtual mask photolithography using a micromirror array

2002 ◽  
Vol 13 (1) ◽  
pp. 18-25 ◽  
Author(s):  
Kook-Nyung Lee ◽  
Dong-Sik Shin ◽  
Yoon-Sik Lee ◽  
Yong-Kweon Kim
Keyword(s):  
Protein Patterning ◽  
Micromirror Array

Digital micromirror array enabled integral field spectroscopy for far-ultraviolet astronomy

2018 ◽  
Author(s):  
Amanda R. Hendrix ◽  
Brian T. Fleming ◽  
Eric Schindhelm ◽  
Rachel M. Tyler ◽  
Emily M. Witt ◽  
...  
Keyword(s):  
Ultraviolet Astronomy ◽  
Integral Field Spectroscopy ◽  
Field Spectroscopy ◽  
Far Ultraviolet ◽  
Integral Field ◽  
Micromirror Array
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