A drive comb-drive actuator with large, stable deflection range for use as an optical shutter

2004 ◽  
Author(s):  
J.D. Grade ◽  
K.Y. Yasumura ◽  
H. Jerman
Keyword(s):  
Comb Drive ◽  
Optical Shutter

An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation

2012 ◽  
Vol 132 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Satoshi Maruyama ◽  
Muneki Nakada ◽  
Makoto Mita ◽  
Takuya Takahashi ◽  
Hiroyuki Fujita ◽  
...  
Keyword(s):  
Equivalent Circuit ◽  
Pulse Width ◽  
Pulse Width Modulation ◽  
Equivalent Circuit Model ◽  
Circuit Model ◽  
Comb Drive ◽  
Optical Scanner

scholarly journals Precise phase control of resonant MOEMS mirrors by comb-drive current feedback

Mechatronics ◽  
2020 ◽  
Vol 71 ◽  
pp. 102420
Author(s):  
David Brunner ◽  
Han Woong Yoo ◽  
Georg Schitter
Keyword(s):  
Phase Control ◽  
Comb Drive ◽  
Current Feedback ◽  
Drive Current

scholarly journals Microfluidic Optical Shutter Flexibly x-y Actuated via Electrowetting-on-Dielectrics with <20 ms Response Time

2017 ◽  
Vol 2017 ◽  
pp. 1-5
Author(s):  
Henning Fouckhardt ◽  
Johannes Strassner ◽  
Carina Heisel ◽  
Dominic Palm ◽  
Christoph Doering
Keyword(s):  
Optical Properties ◽  
Response Time ◽  
Visible Spectral Range ◽  
Contact Structures ◽  
Light Path ◽  
Cell Type ◽  
Electrically Conductive ◽  
Droplet Movement ◽  
In Series ◽  
Optical Shutter

Tunable microoptics deals with devices of which the optical properties can be changed during operation without mechanically moving solid parts. Often a droplet is actuated instead, and thus tunable microoptics is closely related to microfluidics. One such device/module/cell type is an optical shutter, which is moved in or out of the path of the light. In our case the transmitting part comprises a moving transparent and electrically conductive water droplet, embedded in a nonconductive blackened oil, that is, an opaque emulsion with attenuation of 30 dB at 570 nm wavelength over the 250 μm long light path inside the fluid (15 dB averaged over the visible spectral range). The insertion loss of the cell is 1.5 dB in the “open shutter” state. The actuation is achieved via electrowetting-on-dielectrics (EWOD) with rectangular AC voltage pulses of 2·90 V peak-to-peak at 1 kHz. To flexibly allow for horizontal, vertical, and diagonal droplet movement in the upright x-y plane, the contact structures are prepared such that four possible stationary droplet positions exist. The cell is configured as two capacitors in series (along the z axis), such that EWOD forces act symmetrically in the front and back of the 60 nl droplet with a response time of <20 ms.

Analysis of the “Push–pull” Capacitance Bridge Circuit for Comb-Drive Micro-electro-mechanical Oscillators

2015 ◽  
Vol 183 (3-4) ◽  
pp. 313-319 ◽  
Author(s):  
P. Zheng ◽  
W. G. Jiang ◽  
C. S. Barquist ◽  
Y. Lee ◽  
H. B. Chan
Keyword(s):  
Bridge Circuit ◽  
Comb Drive ◽  
Capacitance Bridge ◽  
Mechanical Oscillators

Extremely high aspect ratio metal structures for suspension of a micro-optical shutter

1998 ◽  
Author(s):  
Allan P. Hui ◽  
Risaku Toda ◽  
Masayoshi Esashi
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Metal Structures ◽  
Optical Shutter

Parametric Excitation, Amplification, and Tuning of MEMS Folded-Beam Comb Drive Oscillator

2013 ◽  
Vol 22 (2) ◽  
pp. 318-330 ◽  
Author(s):  
Kareem Khirallah
Keyword(s):  
Parametric Excitation ◽  
Comb Drive

Dynamic characteristics of voltage induced reciprocated bending in double cantilever configuration of asymmetric comb drive MEMS

2015 ◽  
Vol 22 (5) ◽  
pp. 1089-1103 ◽  
Author(s):  
Banibrata Mukherjee ◽  
K. B. M. Swamy ◽  
Siddhartha Sen
Keyword(s):  
Dynamic Characteristics ◽  
Comb Drive

Fast-switching twisted nematic electro-optical shutter and colour filter

1974 ◽  
Vol 10 (7) ◽  
pp. 114 ◽  
Author(s):  
E.P. Raynes ◽  
I.A. Shanks
Keyword(s):  
Colour Filter ◽  
Fast Switching ◽  
Twisted Nematic ◽  
Optical Shutter

Comb-Drive XYZ-microstage With Large Displacements Based on Chip-Level Microassembly

2016 ◽  
Vol 25 (6) ◽  
pp. 989-998 ◽  
Author(s):  
Gaopeng Xue ◽  
Masaya Toda ◽  
Takahito Ono
Keyword(s):  
Large Displacements ◽  
Comb Drive ◽  
On Chip

Passive Optical Shutter for Reducing the Fluorescent Output of a Pulsed Ruby Laser

1968 ◽  
Vol 39 (3) ◽  
pp. 419-419
Author(s):  
Burton G. Schuster ◽  
Robert D. Watson
Keyword(s):  
Ruby Laser ◽  
Optical Shutter
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