Investigation of the Crystal Structure on the Nanomechanical Properties of Pulsed Laser Deposited NbN Thin Films

2012 ◽  
pp. 715-722
Author(s):  
M. A. Mamun ◽  
A. H. Farha ◽  
Y. Ufuktepe ◽  
H. E. Elsayed-Ali ◽  
A. A. Elmustafa
2012 ◽  
Vol 27 (13) ◽  
pp. 1725-1731 ◽  
Author(s):  
Md Abdullah Al Mamun ◽  
Ashraf Hassan Farha ◽  
Yüksel Ufuktepe ◽  
Hani E. Elsayed-Ali ◽  
Abdelmageed A. Elmustafa

Abstract


1994 ◽  
Vol 48 (6) ◽  
pp. 733-736 ◽  
Author(s):  
N. T. McDevitt ◽  
J. S. Zabinski ◽  
M. S. Donley ◽  
J. E. Bultman

Crystalline disorder in thin films plays an important role in determining their properties. Disorder in the crystal structure of MoS2 films prepared by magnetron sputtering and pulsed laser deposition was evaluated with the use of Raman spectroscopy. The peak positions and bandwidths of the first-order Raman bands, in the region 100 to 500 cm−1, were used as a measure of crystalline order. In addition, a low-frequency feature was observed at 223 cm−1 that is not part of the normal first-order spectrum of a fully crystalline specimen. Data presented here demonstrate that this band is characteristic of crystalline disorder, and its intensity depends on the annealing history of the film. This behavior seems to be analogous to the disorder found in graphite thin films.


2000 ◽  
Vol 616 ◽  
Author(s):  
Q. Wei ◽  
S. Yamolenko ◽  
J. Sankar ◽  
A.K. Sharma ◽  
Y. Yamagata ◽  
...  

AbstractWe have investigated the effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous diamondlike carbon (DLC) thin films prepared by pulsed laser deposition. The amorphous carbon films were deposited in various atmospheres such as nitrogen and argon at different pressures. We used Raman spectroscopy and optical microscopy to study the bonding characteristics and microstructures of the DLC films. Nanoindentation measurements were carried out on various samples prepared under different conditions to study the effect of chamber pressure and atmosphere on the elastic modulus and nano-hardness of the films. It was found that reduced vacuum leads to softer amorphous carbon films. Amorphous carbon films prepared in higher pressures exhibit increased density of particulates, and significantly rough surface. The results were understood in terms of thermalization of the laser plasma due to increased possibility of collision.


1998 ◽  
Vol 136 (3) ◽  
pp. 173-177 ◽  
Author(s):  
Chunling Li ◽  
Dafu Cui ◽  
Yueliang Zhou ◽  
Huibin Lu ◽  
Zhenghao Chen ◽  
...  

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