Micro-cantilever has shown wide application prospect in the field of micro-sensors, actuators, gyroscope, and so on. There are abundant research studies on simple cantilever beam models, but there are few on S-shaped folding cantilever with complex structure, although it is widely used. In order to study the deformation failure of S-shaped folding cantilever, the force analysis of S-shaped folding cantilever was carried out in this article, and the stress values of different positions under the external load of the cantilever were deduced. The finite element model about S-shaped folding cantilever was built based on software ANSYS. The theoretical calculation was compared with the finite element calculation, and the results showed that the max stress is 681 MPa based on the derived theoretical formula, the max stress is 673 MPa based on the ANSYS, the error is 1.18%, which can prove formula is accurate. To further validate the stress predicted by the mathematical modeling, a micro-force testing platform was built to test the cantilever. Since the stress value cannot be measured directly in the test, the force corresponding to the stress was taken as standard and compared it with the simulation. The tested external force was corresponding the yield limit. The results showed that the experimental force was 0.06462 N before the plastic deformation occurred, the theoretical outcome was 0.065231 N corresponding the yield limit, the error was 0.94%. Both simulation and experimental results depict that the theoretical model is effective for predicting the stress of the S-shaped folded cantilever. The theoretical model helps to enhance the efficiency, and improve the performance, predictability, and control of the S-shaped folding cantilever.
Optical-readout micro-cantilever array IR imaging system and performance analysis
