Heterogeneously Integrated Aluminum Nitride MEMS Resonators and Filters

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Author(s):  
Enes Calayir ◽  
Srinivas Merugu ◽  
Jaewung Lee ◽  
Navab Singh ◽  
Gianluca Piazza
Keyword(s):  
Aluminum Nitride ◽  
Mems Resonators

scholarly journals Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators

Micromachines ◽  
2015 ◽  
Vol 6 (2) ◽  
pp. 281-290 ◽  
Author(s):  
Jian Yang ◽  
Chaowei Si ◽  
Guowei Han ◽  
Meng Zhang ◽  
Liuhong Ma ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Etching Process ◽  
Mems Resonators

scholarly journals Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

2006 ◽  
Vol 15 (6) ◽  
pp. 1406-1418 ◽  
Author(s):  
Gianluca Piazza ◽  
Philip J. Stephanou ◽  
Albert P. Pisano
Keyword(s):  
Aluminum Nitride ◽  
Mems Resonators ◽  
Contour Mode

Multi-sensitive temperature sensor platforms using aluminum nitride MEMS resonators

2015 ◽  
Vol 25 (11) ◽  
pp. 115016 ◽  
Author(s):  
Humberto Campanella ◽  
Margarita Narducci ◽  
Jeffrey B W Soon ◽  
Srinivas Merugu ◽  
Marco Ferrari ◽  
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Keyword(s):  
Aluminum Nitride ◽  
Temperature Sensor ◽  
Sensor Platforms ◽  
Mems Resonators

RF Passive Components Based on Aluminum Nitride Cross-Sectional Lamé-Mode MEMS Resonators

2017 ◽  
Vol 64 (1) ◽  
pp. 237-243 ◽  
Author(s):  
Cristian Cassella ◽  
Guofeng Chen ◽  
Zhenyun Qian ◽  
Gwendolyn Hummel ◽  
Matteo Rinaldi
Keyword(s):  
Aluminum Nitride ◽  
Cross Sectional ◽  
Passive Components ◽  
Mems Resonators
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