Properties of positive resists. III. The dissolution behavior of poly(methyl methacrylate-co-maleic anhydride)
1990 ◽
Vol 39
(1112)
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pp. 2267-2277
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Keyword(s):
1987 ◽
Vol 52
(9)
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pp. 2194-2203
Keyword(s):
2004 ◽
Vol 43
(1)
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pp. 121-134
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2016 ◽
Vol 21
(3)
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pp. 849-857
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2019 ◽
Vol 27
(8)
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pp. 821-826
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2002 ◽
Vol 83
(13)
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pp. 2823-2834
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Keyword(s):
2015 ◽
Vol 293
(10)
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pp. 2807-2813
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Keyword(s):
1993 ◽
Vol 30
(1)
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pp. 105-111
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