Multilayered non‐uniform atomic force microscope piezoelectric microcantilever control and vibration analysis considering different excitation based on the modified couple stress theory

2020 ◽  
Author(s):  
Moharam Habibnejad Korayem ◽  
Arash Hashemi ◽  
Alireza Habibnejad Korayem
Keyword(s):  
Atomic Force Microscope ◽  
Vibration Analysis ◽  
Couple Stress ◽  
Couple Stress Theory ◽  
Modified Couple Stress Theory ◽  
Stress Theory ◽  
Atomic Force ◽  
Modified Couple Stress ◽  
Piezoelectric Microcantilever

Nanomachining analysis of a multi-cracked atomic force microscope cantilever based on a modified couple stress theory

2015 ◽  
Vol 29 (30) ◽  
pp. 1550186
Author(s):  
Win-Jin Chang ◽  
Yu-Ching Yang ◽  
Haw-Long Lee
Keyword(s):  
Atomic Force Microscope ◽  
Couple Stress ◽  
Removal Rate ◽  
Couple Stress Theory ◽  
Modified Couple Stress Theory ◽  
Depth Of Cut ◽  
Time Curve ◽  
Stress Theory ◽  
Atomic Force ◽  
Modified Couple Stress

The vibration analysis of an atomic force microscope (AFM) cantilever with an arbitrary number of cracks during the nanomachining process is studied based on the modified couple stress theory. The cantilever with [Formula: see text] cracks is divided into [Formula: see text] segments by the cracks and a rotational spring is used to simulate each crack. An analytical expression for the vibration frequency and displacement of the cracked cantilever is derived. According to the analysis, in addition, the displacement increases with an increase in the number of cracks and crack flexibilities. For nanomachining, the displacement of the cantilever tip is related to the depth of cut. The area under the displacement-time curve implies the material removal rate. The present study is useful for the design of an AFM-based nanomachining cantilever with cracks.

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