Stereometric analysis of Ti
1−
x
Al
x
N
thin films deposited by
direct current/radio frequency
magnetron sputtering
2012 ◽
Vol 51
◽
pp. 11PG12
◽
2001 ◽
Vol 40
(Part 1, No. 4B)
◽
pp. 2765-2768
◽
2007 ◽
Vol 253
(10)
◽
pp. 4814-4815
◽
2016 ◽
Vol 307
◽
pp. 684-689
◽
1997 ◽
Vol 15
(3)
◽
pp. 1103-1107
◽