Epitaxial growth of ZnO thin films on R-plane sapphire substrate by radio frequency magnetron sputtering

1997 ◽  
Vol 15 (3) ◽  
pp. 1103-1107 ◽  
Author(s):  
Young Jin Kim ◽  
Yoo Taek Kim ◽  
Hyung Kook Yang ◽  
Jong Chul Park ◽  
Jung In Han ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Epitaxial Growth ◽  
Sapphire Substrate ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Radio Frequency Magnetron Sputtering

Epitaxial growth of ZnO on GaN/sapphire substrate by radio-frequency magnetron sputtering

2010 ◽  
Vol 31 (9) ◽  
pp. 093001 ◽  
Author(s):  
Yang Xiaoli ◽  
Chen Nuofu ◽  
Yin Zhigang ◽  
Zhang Xingwang ◽  
Li Yang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Epitaxial Growth ◽  
Sapphire Substrate ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

scholarly journals Conductive and transparent V-doped ZnO thin films grown by radio frequency magnetron sputtering

2014 ◽  
Vol 557 ◽  
pp. 197-202 ◽  
Author(s):  
Shuhei Okuda ◽  
Takuya Matsuo ◽  
Hiroshi Chiba ◽  
Tatsuya Mori ◽  
Katsuyoshi Washio
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Doped Zno
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