Prefiltration technique via aggregation for constructing low-density high-quality factorized sparse approximate inverse preconditionings

2003 ◽  
Vol 10 (3) ◽  
pp. 235-246 ◽  
Author(s):  
A. A. Nikishin ◽  
A. Yu. Yeremin
Author(s):  
L. Mulestagno ◽  
J.C. Holzer ◽  
P. Fraundorf

Due to the wealth of information, both analytical and structural that can be obtained from it TEM always has been a favorite tool for the analysis of process-induced defects in semiconductor wafers. The only major disadvantage has always been, that the volume under study in the TEM is relatively small, making it difficult to locate low density defects, and sample preparation is a somewhat lengthy procedure. This problem has been somewhat alleviated by the availability of efficient low angle milling.Using a PIPS® variable angle ion -mill, manufactured by Gatan, we have been consistently obtaining planar specimens with a high quality thin area in excess of 5 × 104 μm2 in about half an hour (milling time), which has made it possible to locate defects at lower densities, or, for defects of relatively high density, obtain information which is statistically more significant (table 1).


2010 ◽  
Vol 645-648 ◽  
pp. 151-154 ◽  
Author(s):  
Philip Hens ◽  
Günter Wagner ◽  
Astrid Hölzing ◽  
Rainer Hock ◽  
Peter J. Wellmann

Usually a waiting step at around 1000°C to 1100°C during the carbonization step for 3C-SiC on silicon is implemented for establishing a closed carbon layer to prevent the formation of voids. The latter, however, may lead to non-ideal nucleation conditions for high quality layers with a low density of domain boundaries. Our investigations indicate that a continuous ramp-up as fast as possible with no waiting step would be preferable. The worst layer quality, as measured by peak intensity and FWHM of the (200) reflection of 3C SiC, can be found at a temperature of about 1000°C, which indicates that here the nucleation rate would be the highest. So longer periods within this temperature range should be avoided by applying high ramping speeds during the carbonization step.


2017 ◽  
Vol 113 ◽  
pp. 19-24 ◽  
Author(s):  
Jiří Kopal ◽  
Miroslav Rozložník ◽  
Miroslav Tůma

2014 ◽  
Vol 2014 ◽  
pp. 1-10 ◽  
Author(s):  
D. Z. Ding ◽  
G. M. Li ◽  
Y. Y. An ◽  
R. S. Chen

The higher-order hierarchical Legendre basis functions combining the electrical field integral equations (EFIE) are developed to solve the scattering problems from the rough surface. The hierarchical two-level spectral preconditioning method is developed for the generalized minimal residual iterative method (GMRES). The hierarchical two-level spectral preconditioner is constructed by combining the spectral preconditioner and sparse approximate inverse (SAI) preconditioner to speed up the convergence rate of iterative methods. The multilevel fast multipole method (MLFMM) is employed to reduce memory requirement and computational complexity of the method of moments (MoM) solution. The accuracy and efficiency are confirmed with a couple of numerical examples.


2019 ◽  
Vol 41 (3) ◽  
pp. C139-C160 ◽  
Author(s):  
Massimo Bernaschi ◽  
Mauro Carrozzo ◽  
Andrea Franceschini ◽  
Carlo Janna

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