Micro hot embossing mold of microfluidic chip used in flow cytometry is designed and
microfabricated. After some kinds of microfabrication processes are tried, this paper presents a
novel microfabrication technology of micro hot embossing metal mold. Micro metal mold is
fabricated by low-cost UV-LIGA surface micro fabrication process using negative thick photoresist,
SU-8. Different from other micro hot embossing molds, the micro mold with vertical sidewalls is
fabricated by micro nickel electroforming directly on Nickel base. Based on the micro Nickel mold
and automation fabrication system, high precision and mass-producing microfluidic chips have been
fabricated and they have been used in flow cytometry