Radial distribution of C 4 H 8 –H 2 –TMS plasma during plasma‐enhanced chemical vapor deposition of Si‐doped glow discharge polymers

2019 ◽  
Vol 17 (3) ◽  
pp. 1900075
Author(s):  
Xing Ai ◽  
Xiao‐Shan He ◽  
Guo Chen ◽  
Ling Zhang ◽  
Jing‐Lin Huang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Glow Discharge ◽  
Radial Distribution ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Si Doped

Characteristics of Si‐doped GaAs epilayers grown by metalorganic chemical vapor deposition using a silane source

1987 ◽  
Vol 51 (20) ◽  
pp. 1634-1636 ◽  
Author(s):  
Chee‐Wee Liu ◽  
Sheng‐Li Chen ◽  
Jyh‐pyng Lay ◽  
Si‐Chen Lee ◽  
Hao‐Hsiung Lin
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Si Doped ◽  
Metalorganic Chemical
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