On the role of secondary electron emission in capacitively coupled radio‐frequency plasma sheath: A theoretical ground

Plasma Processes and Polymers ◽

10.1002/ppap.201900093 ◽

2019 ◽

Vol 16 (11) ◽

pp. 1900093 ◽

Author(s):

Guang‐Yu Sun ◽

Han‐Wei Li ◽

An‐Bang Sun ◽

Yuan Li ◽

Bai‐Peng Song ◽

...

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Plasma Sheath ◽

Theoretical Ground ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

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Spatial variations of radio frequency plasma density caused by a step‐change of secondary electron emission coefficient

Journal of Applied Physics ◽

10.1063/1.359452 ◽

1995 ◽

Vol 77 (9) ◽

pp. 4293-4301 ◽

Author(s):

Weilu Xu ◽

Paul J. Sides

Keyword(s):

Radio Frequency ◽

Plasma Density ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Step Change ◽

Radio Frequency Plasma ◽

Emission Coefficient ◽

Secondary Electron Emission Coefficient ◽

Frequency Plasma

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The role of electron induced secondary electron emission from SiO2surfaces in capacitively coupled radio frequency plasmas operated at low pressures

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aa963d ◽

2017 ◽

Vol 26 (12) ◽

pp. 124001 ◽

Author(s):

B Horváth ◽

M Daksha ◽

I Korolov ◽

A Derzsi ◽

J Schulze

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Capacitively Coupled ◽

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Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abf321 ◽

2021 ◽

Author(s):

Shu Zhang ◽

Guangyu Sun ◽

Arnas Volčokas ◽

Guan-Jun Zhang ◽

Anbang Sun

Keyword(s):

Radio Frequency ◽

Plasma Discharge ◽

Radio Frequency Plasma ◽

Trap States ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Dynamic Charging

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Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide

Applied Physics Letters ◽

10.1063/1.1827353 ◽

2004 ◽

Vol 85 (21) ◽

pp. 4875-4877 ◽

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Discharge Plasma ◽

Secondary Electron Emission ◽

High Density ◽

Capacitively Coupled ◽

Radio Frequency Discharge

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The role of the metastable O2(b${{}^{1}}{\Sigma}_{\text {g}}^{+}$ ) and energy-dependent secondary electron emission yields in capacitively coupled oxygen discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/5/055002 ◽

2016 ◽

Vol 25 (5) ◽

pp. 055002 ◽

Author(s):

H Hannesdottir ◽

J T Gudmundsson

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Capacitively Coupled ◽

Energy Dependent

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Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

Physics of Plasmas ◽

10.1063/1.4893148 ◽

2014 ◽

Vol 21 (8) ◽

pp. 083509 ◽

Author(s):

B. Bora ◽

L. Soto

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

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A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/49/23/234001 ◽

2016 ◽

Vol 49 (23) ◽

pp. 234001 ◽

Author(s):

M Daksha ◽

B Berger ◽

E Schuengel ◽

I Korolov ◽

A Derzsi ◽

...

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Spectroscopic Technique

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Assessing the role of secondary electron emission on the characteristics of 6-cavity magnetrons with transparent cathode through particle-in-cell simulations

Journal of Applied Physics ◽

10.1063/1.4878237 ◽

2014 ◽

Vol 115 (19) ◽

pp. 193303 ◽

Author(s):

Hao Qiu ◽

Sarita Prasad ◽

Lars Ludeking ◽

Ravi P. Joshi ◽

Edl Schamiloglu

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Particle In Cell

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Temperature dependence of surface charging of NaCl under electron irradiation: role of secondary electron emission

Applied Surface Science ◽

10.1016/0169-4332(94)00166-9 ◽

1994 ◽

Vol 81 (2) ◽

pp. 215-221 ◽

Author(s):

W.G. Durrer ◽

M. Portillo ◽

P. Wang ◽

D.P. Russell

Keyword(s):

Temperature Dependence ◽

Electron Irradiation ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Surface Charging

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DYNAMICAL MODEL OF THE RADIO-FREQUENCY PLASMA SHEATH

Acta Physica Sinica ◽

10.7498/aps.50.2398 ◽

2001 ◽

Vol 50 (12) ◽

pp. 2398

Author(s):

DAI ZHONG-LING ◽

WANG YOU-NIAN ◽

MA TENG-CAI

Keyword(s):

Radio Frequency ◽

Plasma Sheath ◽

Dynamical Model ◽

Radio Frequency Plasma ◽

Frequency Plasma

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