The role of the metastable O2(b${{}^{1}}{\Sigma}_{\text {g}}^{+}$ ) and energy-dependent secondary electron emission yields in capacitively coupled oxygen discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/5/055002 ◽

2016 ◽

Vol 25 (5) ◽

pp. 055002 ◽

Author(s):

H Hannesdottir ◽

J T Gudmundsson

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Capacitively Coupled ◽

Energy Dependent

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The role of electron induced secondary electron emission from SiO2surfaces in capacitively coupled radio frequency plasmas operated at low pressures

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aa963d ◽

2017 ◽

Vol 26 (12) ◽

pp. 124001 ◽

Author(s):

B Horváth ◽

M Daksha ◽

I Korolov ◽

A Derzsi ◽

J Schulze

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Capacitively Coupled ◽

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On the role of secondary electron emission in capacitively coupled radio‐frequency plasma sheath: A theoretical ground

Plasma Processes and Polymers ◽

10.1002/ppap.201900093 ◽

2019 ◽

Vol 16 (11) ◽

pp. 1900093 ◽

Author(s):

Guang‐Yu Sun ◽

Han‐Wei Li ◽

An‐Bang Sun ◽

Yuan Li ◽

Bai‐Peng Song ◽

...

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Plasma Sheath ◽

Theoretical Ground ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

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Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/3/034002 ◽

2015 ◽

Vol 24 (3) ◽

pp. 034002 ◽

Author(s):

A Derzsi ◽

I Korolov ◽

E Schüngel ◽

Z Donkó ◽

J Schulze

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Energy Dependent

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Assessing the role of secondary electron emission on the characteristics of 6-cavity magnetrons with transparent cathode through particle-in-cell simulations

Journal of Applied Physics ◽

10.1063/1.4878237 ◽

2014 ◽

Vol 115 (19) ◽

pp. 193303 ◽

Author(s):

Hao Qiu ◽

Sarita Prasad ◽

Lars Ludeking ◽

Ravi P. Joshi ◽

Edl Schamiloglu

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Particle In Cell

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Temperature dependence of surface charging of NaCl under electron irradiation: role of secondary electron emission

Applied Surface Science ◽

10.1016/0169-4332(94)00166-9 ◽

1994 ◽

Vol 81 (2) ◽

pp. 215-221 ◽

Author(s):

W.G. Durrer ◽

M. Portillo ◽

P. Wang ◽

D.P. Russell

Keyword(s):

Temperature Dependence ◽

Electron Irradiation ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Surface Charging

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Effects of secondary electron emission on plasma density and electron excitation dynamics in dual-frequency asymmetric capacitively coupled argon plasmas

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aaca8c ◽

2018 ◽

Vol 27 (6) ◽

pp. 064004 ◽

Author(s):

Gang-Hu Liu ◽

Xiang-Yu Wang ◽

Yong-Xin Liu ◽

Jing-Yu Sun ◽

You-Nian Wang

Keyword(s):

Plasma Density ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Electron Excitation ◽

Dual Frequency ◽

Capacitively Coupled ◽

Argon Plasmas ◽

Excitation Dynamics

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68. Role of defects in secondary electron emission of efficient cathodes

Vacuum ◽

10.1016/0042-207x(72)91224-9 ◽

1972 ◽

Vol 22 (1) ◽

pp. 32

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission

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THE ROLE OF SECONDARY ELECTRON EMISSION ON THE ECR PLASMA

Plasma Production by Laser Ablation ◽

10.1142/9789812702555_0026 ◽

2004 ◽

Author(s):

L. SCHACHTER ◽

K. E. STIEBING ◽

S. DOBRESCU ◽

A. G. DRENTJE ◽

S. GAMMINO ◽

...

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

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The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aa7c88 ◽

2017 ◽

Vol 26 (8) ◽

pp. 085006 ◽

Author(s):

M Daksha ◽

A Derzsi ◽

S Wilczek ◽

J Trieschmann ◽

T Mussenbrock ◽

...

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Heavy Particle ◽

Secondary Electron Emission ◽

Dual Frequency ◽

Power Absorption ◽

Capacitively Coupled ◽

Coupled Plasmas

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Production of High-Density Capacitively Coupled Plasma with RF Multi-Hollow Cathode and/or High Secondary Electron Emission for DLC Film Preparation

Plasma Processes and Polymers ◽

10.1002/ppap.200931001 ◽

2009 ◽

Vol 6 (S1) ◽

pp. S458-S461 ◽

Author(s):

Yasunori Ohtsu ◽

Chisa Nakamura ◽

Tatsuya Misawa ◽

Hiroharu Fujita ◽

Morito Akiyama ◽

...

Keyword(s):

Hollow Cathode ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

High Density ◽

Capacitively Coupled ◽

Dlc Film ◽

Film Preparation ◽

Capacitively Coupled Plasma

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