Optical and structural properties of silicon-rich silicon oxide films: Comparison of ion implantation and molecular beam deposition methods

2011 ◽  
Vol 208 (9) ◽  
pp. 2176-2181 ◽  
Author(s):  
Timur Nikitin ◽  
Kerttu Aitola ◽  
Sergei Novikov ◽  
Markku Räsänen ◽  
Rama Velagapudi ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Structural Properties ◽  
Molecular Beam ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Molecular Beam Deposition ◽  
Beam Deposition

Molecular beam deposition of high quality silicon oxide dielectric films

1995 ◽  
Vol 148 (4) ◽  
pp. 336-344 ◽  
Author(s):  
Naresh Chand ◽  
J.E. Johnson ◽  
J.W. Osenbach ◽  
W.C. Liang ◽  
L.C. Feldman ◽  
...  
Keyword(s):  
Molecular Beam ◽  
Silicon Oxide ◽  
Dielectric Films ◽  
High Quality ◽  
Molecular Beam Deposition ◽  
Beam Deposition

Structural properties of thermoelectric CoSb3 skutterudite thin films prepared by molecular beam deposition

2015 ◽  
Vol 624 ◽  
pp. 216-225 ◽  
Author(s):  
M.V. Daniel ◽  
C. Brombacher ◽  
G. Beddies ◽  
N. Jöhrmann ◽  
M. Hietschold ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Molecular Beam ◽  
Molecular Beam Deposition ◽  
Beam Deposition

Stress free and moisture insensitive silicon oxide dielectric films formed by molecular‐beam deposition

1995 ◽  
Vol 78 (5) ◽  
pp. 3315-3322 ◽  
Author(s):  
Naresh Chand ◽  
R. R. Kola ◽  
R. L. Opila ◽  
R. B. Comizzoli ◽  
H. Krautter ◽  
...  
Keyword(s):  
Molecular Beam ◽  
Silicon Oxide ◽  
Dielectric Films ◽  
Molecular Beam Deposition ◽  
Beam Deposition

Optical and structural properties of SiOx films grown by molecular beam deposition: Effect of the Si concentration and annealing temperature

2012 ◽  
Vol 112 (9) ◽  
pp. 094316 ◽  
Author(s):  
Timur Nikitin ◽  
Rama Velagapudi ◽  
Jani Sainio ◽  
Jouko Lahtinen ◽  
Markku Räsänen ◽  
...  
Keyword(s):  
Structural Properties ◽  
Molecular Beam ◽  
Annealing Temperature ◽  
Molecular Beam Deposition ◽  
Deposition Effect ◽  
Beam Deposition

Research of the morphological and structural properties of CdTe films obtained by chemical molecular beam deposition for thin film solar cells

2015 ◽  
Vol 51 (4) ◽  
pp. 314-318 ◽  
Author(s):  
K. M. Kuchkarov ◽  
T. M. Razykov ◽  
Chris Ferekides ◽  
B. A. Ergashev ◽  
R. T. Yuldoshov ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Structural Properties ◽  
Molecular Beam ◽  
Thin Film Solar Cells ◽  
Molecular Beam Deposition ◽  
Cdte Films ◽  
Beam Deposition

Ozone-enhanced molecular beam deposition of nickel oxide (NiO) for sensor applications

1997 ◽  
Vol 310 (1-2) ◽  
pp. 19-23 ◽  
Author(s):  
Alexandra Neubecker ◽  
Thomas Pompl ◽  
Theodor Doll ◽  
Walter Hansch ◽  
Ignaz Eisele
Keyword(s):  
Nickel Oxide ◽  
Molecular Beam ◽  
Sensor Applications ◽  
Molecular Beam Deposition ◽  
Beam Deposition
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