Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer
2015 ◽
Vol 213
(1)
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pp. 114-121
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2015 ◽
Vol 1110
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pp. 211-217
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2010 ◽
Vol 157
(10)
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pp. H909
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2018 ◽
Vol 390
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pp. 270-277
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