Growth and characterization of thin Si-C films in RF plasma and optical emission spectroscopy
2012 ◽
Vol 26
(10-11)
◽
pp. 1313-1323
2018 ◽
Vol 442
◽
pp. 412-416
◽
2020 ◽
Vol 370
◽
pp. 111278
◽
Keyword(s):
Keyword(s):
2001 ◽
Vol 142-144
◽
pp. 360-364
◽