The Ion Charge Fluctuation Effect on Impurity Depth Distributions for High-Energy Ion Implantation. The Backward Transport Equation-Based Simulation

1992 ◽  
Vol 169 (1) ◽  
pp. 33-38 ◽  
Author(s):  
A. F. Burenkov ◽  
F. F. Komarov ◽  
S. A. Fedotov
Keyword(s):  
Ion Implantation ◽  
Transport Equation ◽  
High Energy ◽  
Charge Fluctuation ◽  
Fluctuation Effect ◽  
Depth Distributions

Macrodefect formation in semiconductors during high energy ion implantation: Monte Carlo simulation of damage depth distributions

1995 ◽  
Vol 29 (1-3) ◽  
pp. 202-205 ◽  
Author(s):  
S.A. Fedotov ◽  
V.S. Varichenko ◽  
A.M. Zaitsev ◽  
M. Ishimaru ◽  
Y. Hiroyama ◽  
...  
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Ion Implantation ◽  
High Energy ◽  
Damage Depth ◽  
Depth Distributions

Long Period Gratings in Multimode Fiber Fabricated with High-Energy Ion Implantation

2003 ◽  
Vol 22 (4) ◽  
pp. 225-237
Author(s):  
K. J. GRANT ◽  
ROBERTS A. ◽  
D. N. JAMIESON ◽  
B. ROUT ◽  
C. CHER
Keyword(s):  
Ion Implantation ◽  
High Energy ◽  
Multimode Fiber ◽  
Long Period ◽  
Long Period Gratings

Effects of high-energy (MeV) ion implantation of polyester films

1991 ◽  
Vol 59-60 ◽  
pp. 1263-1266 ◽  
Author(s):  
Ueno Keiji ◽  
Matsumoto Yasuyo ◽  
Nishimiya Nobuyuki ◽  
Noshiro Mitsuru ◽  
Satou Mamoru
Keyword(s):  
Ion Implantation ◽  
High Energy

High-energy ion implantation in polymer films

Vacuum ◽  
1992 ◽  
Vol 43 (5-7) ◽  
pp. 699-701 ◽  
Author(s):  
L Ya Alimova ◽  
IE Djamaletdinova ◽  
TS Pugacheva ◽  
IE Ilicheva
Keyword(s):  
Ion Implantation ◽  
Polymer Films ◽  
High Energy
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