scholarly journals Understanding Reproducibility of Sputter Deposited Metastable Ferroelectric Wurtzite Al 0.6 Sc 0.4 N Films using In‐situ Optical Emission Spectrometry

Author(s):  
Daniel Drury ◽  
Keisuke Yazawa ◽  
Allison Mis ◽  
Kevin Talley ◽  
Andriy Zakutayev ◽  
...  
2017 ◽  
Vol 32 (9) ◽  
pp. 1798-1804 ◽  
Author(s):  
S. Gaiaschi ◽  
S. Richard ◽  
P. Chapon ◽  
O. Acher

We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GD-OES) instrument, which provides the depth information during the profiling process.


2011 ◽  
Vol 56 (3) ◽  
pp. 1329-1336 ◽  
Author(s):  
D. Mercier ◽  
Q. Van Overmeere ◽  
R. Santoro ◽  
J. Proost

2021 ◽  
Author(s):  
Yaru Zhang ◽  
Xuefei Mao ◽  
Di Tian ◽  
Jixin Liu ◽  
Chunsheng Li

In this work, a novel method using a low-cost miniaturized hydride generation optical emission spectrometry coupled with in-situ dielectric barrier discharge trap (HG-in-situ DBD trap-OES) was established for the determination...


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