Understanding Reproducibility of Sputter Deposited Metastable Ferroelectric Wurtzite Al
0.6
Sc
0.4
N Films using
In‐situ
Optical Emission Spectrometry
Keyword(s):
2017 ◽
Vol 32
(9)
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pp. 1798-1804
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2011 ◽
Vol 56
(3)
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pp. 1329-1336
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2012 ◽
Vol 15
(1)
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pp. C1
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2009 ◽