X-ray microanalytical senstivity and spatial resolution in scanning transmission electron microscopes

1978 ◽  
Vol 7 (4) ◽  
pp. 184-189 ◽  
Author(s):  
R. G. Faulkner ◽  
K. Norgård
Keyword(s):  
Spatial Resolution ◽  
X Ray ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Microscopes

Future Direction of High-Resolution X-Ray Microanalysis in the AEM

2001 ◽  
Vol 7 (S2) ◽  
pp. 212-213
Author(s):  
M. Watanabe ◽  
D.B. Williams
Keyword(s):  
Spatial Resolution ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
X Ray ◽  
Lehigh University ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Microscopes ◽  
Future Direction ◽  
Compromise Design

Current commercial analytical electron microscopes (AEMs) including scanning transmission electron microscopes (STEMs) are a compromise design between the highest spatial, analytical and energy resolutions. in contrast, a VG HB603 STEM at Lehigh University has been designed with a 300 kV cold field-emission gun and twin X-ray detectors to maximize X-ray generation and collection efficiencies [1]. in addition, instrumental features of almost no stray radiation, ultra-high vacuum (<10−7 Pa in the stage and <10−7 Pa in the gun), beam blanking and direct probe-current measurement in the HB 603 have transformed the approaches to quantitative analysis. By using such modern AEMs, it is now possible to perform X-ray microanalysis with the spatial resolution as low as 1.5 nm and the detectability limits of∽2 atoms in the analyzed volume [2]. Furthermore, even quantitative X-ray mapping becomes achievable, while maintaining, high spatial resolution (the original aim of such instruments) [3].

scholarly journals Evolution in X-ray Analysis from Micro to Atomic Scales in Aberration- Corrected Scanning Transmission Electron Microscopes

Microscopy ◽  
2021 ◽  
Author(s):  
M Watanabe ◽  
R F Egerton
Keyword(s):  
Materials Characterization ◽  
Atomic Resolution ◽  
Single Atom ◽  
Analytical Sensitivity ◽  
X Ray ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Resolution Analysis ◽  
Electron Microscopes

Abstract X-ray analysis is one of the most robust approaches to extract quantitative information from various materials, and is widely used in various fields ever since Raimond Castaing established procedures to analyze electron-induced X-ray signals for materials characterization 70 years ago. The recent development of aberration-correction technology in a (scanning) transmission electron microscopes (S/TEM) offers refined electron probes below the Å level, making atomic-resolution X-ray analysis possible. In addition, the latest silicon drift detectors (SDDs) allow complex detector arrangements and new configurational designs to maximize the collection efficiency of X-ray signals, which make it feasible to acquire X-ray signals from single atoms. In this review paper, recent progress and advantages related to S/TEM-based X-ray analysis will be discussed: (1) progress in quantification for materials characterization including the recent applications to light element analysis, (2) progress in analytical spatial resolution for atomic-resolution analysis and (3) progress in analytical sensitivity toward single atom detection and analysis in materials. Both atomic resolution analysis and single atom analysis are evaluated theoretically through multislice-based calculation for electron propagation in oriented crystalline specimen in combination with X-ray spectrum simulation.

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