Continuing evolution of energy-dispersive x-ray spectrometer (EDS) systems has greatly advanced x-ray detector performance in analytical electron microscopes. The latest detectors offer improved energy resolution, count rate performance, geometrical collection efficiency, durability, and efficiency for light and heavy elements. Innovative detector designs for transmission and scanning transmission electron microscopes (TEM/STEMs) include such features as liquid-nitrogen-free operation, in situ de-icing of the detector crystal, user cleanable windows, demountable windows, ultrahigh vacuum compatibility (including adaptations to allow microscope bakeouts without removing the detector), beam damage protection, and microscope interfaces with optimized collection geometries. Divergent design philosophies have produced a variety of systems with specialized features, and users may face hard choices in selecting the best detector for the job. The aim of this paper is to review the current state of EDS detector development and the importance of the performance improvements to TEM/STEM users.
Absolute-Scale Comparison with Simulation for Quantitative Energy-Dispersive X-Ray Spectroscopy in Atomic-Resolution Scanning Transmission Electron Microscopy
