Micromachined Ultrasonic Transducers

2008 ◽  
pp. 453-478 ◽  
Author(s):  
Massimo Pappalardo ◽  
Giosue Caliano ◽  
Alessandro S. Savoia ◽  
Alessandro Caronti
Keyword(s):  
Ultrasonic Transducers

Modelling of functionally graded piezoelectric ultrasonic transducers

2007 ◽  
Author(s):  
Wilfredo M. Rubio ◽  
Flavio Buiochi ◽  
Julio C. Adamowski ◽  
Emilio C. N. Silva
Keyword(s):  
Functionally Graded ◽  
Ultrasonic Transducers ◽  
Functionally Graded Piezoelectric

Ultrasonic transducers using PVDF

1991 ◽  
Vol 115 (1) ◽  
pp. 267-278 ◽  
Author(s):  
S. Hurmila ◽  
H. Stubb ◽  
J. Pitkanen ◽  
K. Lahdenpera ◽  
A. Penttinen ◽  
...  
Keyword(s):  
Ultrasonic Transducers

scholarly journals Encapsulation of Capacitive Micromachined Ultrasonic Transducers (CMUTs) for the Acoustic Communication between Medical Implants

Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 421
Author(s):  
Jorge Oevermann ◽  
Peter Weber ◽  
Steffen H. Tretbar
Keyword(s):  
Data Security ◽  
Ultrasonic Transducers ◽  
Surrounding Tissue ◽  
Center Frequency ◽  
Medical Implants ◽  
Research Groups ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Polyether Ether Ketone ◽  
High Bandwidth ◽  
Ether Ketone

The aim of this work was to extend conventional medical implants by the possibility of communication between them. For reasons of data security and transmitting distances, this communication should be realized using ultrasound, which is generated and detected by capacitive micromachined ultrasonic transducers (CMUTs). These offer the advantage of an inherent high bandwidth and a high integration capability. To protect the surrounding tissue, it has to be encapsulated. In contrast to previous results of other research groups dealing with the encapsulation of CMUTs, the goal here is to integrate the CMUT into the housing of a medical implant. In this work, CMUTs were designed and fabricated for a center frequency of 2 MHz in water and experimentally tested on their characteristics for operation behind layers of Polyether ether ketone (PEEK) and titanium, two typical materials for the housings of medical implants. It could be shown that with silicone as a coupling layer it is possible to operate a CMUT behind the housing of an implant. Although it changes the characteristics of the CMUT, the setup is found to be well suited for communication between two transducers over a distance of at least 8 cm.

scholarly journals Design of silicon membranes for ultrasonic transducers and its fabrication by anisotropic wet etching

2020 ◽  
Vol 1697 ◽  
pp. 012100
Author(s):  
S V Malohatko ◽  
E Yu Gusev ◽  
J Y Jityaeva ◽  
O A Ageev
Keyword(s):  
Wet Etching ◽  
Ultrasonic Transducers ◽  
Silicon Membranes
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