Gas discrimination by simultaneous sound velocity and attenuation measurements using uncoated capacitive micromachined ultrasonic transducers

Chemically functionalized or coated sensors are by far the most employed solution in gas sensing. However, their poor long term stability represents a concern in applications dealing with hazardous gases. Uncoated sensors are durable but their selectivity is poor or non-existent. In this study, multi-parametric discrimination is used as an alternative to selectivity for uncoated capacitive micromachined ultrasonic transducers (CMUTs). This paper shows how measuring simultaneously the attenuation coefficient and the time of flight under different nitrogen mixtures allows to identify hydrogen, carbon dioxide and methane from each other and determine their concentration along with identification of temperature and humidity drifts. Theoretical comparison and specific signal processing to deal with the issue of multiple reflections are also presented. Some potential applications are monitoring of refueling stations, vehicles and nuclear waste storage facilities.

Contrast-enhanced Ultrasound Imaging Using Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducers (CMUTs) have a nonlinear relationship between the applied voltage and the emitted signal, which is detrimental to conventional contrast-enhanced ultrasound (CEUS) techniques. Instead, a three-pulse amplitude modulation (AM) sequence has been proposed, which is not adversely affectedby the emitted harmonics. In this paper, this is shown theoretically, and the performance of the sequence is verified using a 4.8 MHz linear CMUT array, and a comparable lead zirconate titanate (PZT) array, across 6 V to 60 V applied AC voltage. CEUS images of the contrast agent SonoVue flowing through a 3D printed hydrogel phantom showed an average enhancement in contrast-to-tissue ratio (CTR) between B-mode and CEUS images of 49.9 dB and 37.4 dB for the PZT array and CMUT, respectively. Furthermore, hydrophone recordings of the emitted signals showed that the nonlinear emissions from the CMUT did not significantly degrade the cancellation in the compounded AM signal, leaving an average of 2% of the emitted power between 26 V and 60 V AC. Thus, it is demonstrated that CMUTs are capable of CEUS imaging independent of the applied excitation voltage when using a three-pulse AM sequence.

Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements. In this paper, two novel CMUTs are proposed for the first time to improve the measuring performance of micro-pressure in the range of 0–10 kPa. The core concept of the enhancement is strengthening membrane deformability by partly adjusting the CMUT framework under the combined action of electrostatic force and uniform pressure. Two modified structures of an inverted frustum cone-like cavity and slotted membrane are presented, respectively, and a finite element model (FEM) of CMUT was constructed and analyzed using COMSOL Multiphysics 5.5. The results demonstrate that the maximum displacement and pressure sensitivity are improved by 16.01% and 30.79% for the frustum cone-like cavity and 104.22% and 1861.31% for the slotted membrane, respectively. Furthermore, the results show that the width uniformity of the grooves does not influence the characteristics of the membrane, which mainly depend on the total width of the grooves, greatly enriching design flexibility. In brief, the proposed structural designs can significantly improve the micro-pressure measurement performance of the CMUT, which will accelerate the rapid breakthrough of technical barriers in the fields of aerospace, industry control, and other sensing domains.

Gas Discrimination by Simultaneous Sound Velocity and Attenuation Measurements using Uncoated Capacitive Micromachined Ultrasonic Transducers

Chemically functionalized or coated sensors are by far the most employed solution in gas sensing. However, their poor long term stability represents a concern in applications dealing with hazardous gases. Uncoated sensors are durable but their selectivity is poor or non-existent. In this study, multi-parametric discrimination is used as an alternative to selectivity for uncoated capacitive micromachined ultrasonic transducers (CMUTs). This paper shows how measuring simultaneously the attenuation coefficient and the time of flight under different nitrogen mixtures allows to identify hydrogen, carbon dioxide and methane from each other and determine their concentration along with identification of temperature drift. Theoretical comparison and specific signal processing to deal with the issue of multiple reflections are also presented. Some potential applications are monitoring of refueling stations, vehicles and nuclear waste storage facilities.

A Review of Transparent Sensors for Photoacoustic Imaging Applications

Photoacoustic imaging is a new type of noninvasive, nonradiation imaging modality that combines the deep penetration of ultrasonic imaging and high specificity of optical imaging. Photoacoustic imaging systems employing conventional ultrasonic sensors impose certain constraints such as obstructions in the optical path, bulky sensor size, complex system configurations, difficult optical and acoustic alignment, and degradation of signal-to-noise ratio. To overcome these drawbacks, an ultrasonic sensor in the optically transparent form has been introduced, as it enables direct delivery of excitation light through the sensors. In recent years, various types of optically transparent ultrasonic sensors have been developed for photoacoustic imaging applications, including optics-based ultrasonic sensors, piezoelectric-based ultrasonic sensors, and microelectromechanical system-based capacitive micromachined ultrasonic transducers. In this paper, the authors review representative transparent sensors for photoacoustic imaging applications. In addition, the potential challenges and future directions of the development of transparent sensors are discussed.

Capacitive micromachined ultrasonic transducers: Transmission evaluation with different membrane materials and dimensions

Capacitive micromachined ultrasonic transducers (CMUTs) are dominant in generating and receiving acoustic signals. CMUT transmission efficiency solely depends upon the membrane material utilized. This work presents the structural examination of receiving and transmitting characteristics of CMUT with divergent membrane materials, namely Silicon (Si), Silicon Nitride ( Si 3 N 4 {\mathrm{Si}_{3}}{\text{N}_{4}} ), Indium Phosphide (InP), Zinc Oxide (ZnO), and Polysilicon (Poly-Si). The analysis includes the membrane deflection, pull-in voltage, output pressure, resonant frequency and capacitance modification with variable DC voltage. It has been found that InP gives the pull-in voltage comparable to Si in the receiving mode and have more transduction efficiency in transmitting mode. Effect of dimensions of CMUT on pull-in voltage and resonant frequency are also discussed. The major contribution lies in the analytical and estimation study of CMUT for appropriate membrane material selection meant for transmission and reception in the field of pressure sensing application.