Model based control of a piezo-actuated axis
2008 ◽
pp. 413-416
2011 ◽
Vol 131
(2)
◽
pp. 159-165
◽
2020 ◽
Vol 140
(4)
◽
pp. 272-280
Keyword(s):
Keyword(s):
1999 ◽
Keyword(s):