Origins of 1/f Noise in Electronic Materials and Devices: A Historical Perspective

2020 ◽  
pp. 1-31
Author(s):  
D. M. Fleetwood
Keyword(s):  
Historical Perspective ◽  
Electronic Materials

Applications of SIMS to electronic materials and devices

1992 ◽  
Vol 50 (2) ◽  
pp. 1682-1683
Author(s):  
S.F. Corcoran
Keyword(s):  
Depth Distribution ◽  
Secondary Ion Mass Spectrometry ◽  
Semiconductor Device ◽  
Electronic Materials ◽  
Profile Analysis ◽  
Semiconductor Industry ◽  
Small Diameter ◽  
Depth Resolution ◽  
Detection Sensitivity

Over the past decade secondary ion mass spectrometry (SIMS) has played an increasingly important role in the characterization of electronic materials and devices. The ability of SIMS to provide part per million detection sensitivity for most elements while maintaining excellent depth resolution has made this technique indispensable in the semiconductor industry. Today SIMS is used extensively in the characterization of dopant profiles, thin film analysis, and trace analysis in bulk materials. The SIMS technique also lends itself to 2-D and 3-D imaging via either the use of stigmatic ion optics or small diameter primary beams.By far the most common application of SIMS is the determination of the depth distribution of dopants (B, As, P) intentionally introduced into semiconductor materials via ion implantation or epitaxial growth. Such measurements are critical since the dopant concentration and depth distribution can seriously affect the performance of a semiconductor device. In a typical depth profile analysis, keV ion sputtering is used to remove successive layers the sample.

Sleep Apnea—An Historical Perspective

1990 ◽  
Vol 23 (4) ◽  
pp. 571-575
Author(s):  
Charles F. Koopmann, ◽  
Willard B. Moran
Keyword(s):  
Sleep Apnea ◽  
Historical Perspective

Equal Opportunity in Education: A Sociological-Historical Perspective

1975 ◽  
Vol 20 (4) ◽  
pp. 317-318
Author(s):  
JOHN W. McDAVID
Keyword(s):  
Historical Perspective ◽  
Equal Opportunity

Early Education in Short-Range Historical Perspective

1969 ◽  
Vol 14 (8) ◽  
pp. 437-438
Author(s):  
CELIA STENDLER LAVATELLI
Keyword(s):  
Short Range ◽  
Historical Perspective ◽  
Early Education

Review of Statistics in Psychology: An Historical Perspective.

1991 ◽  
Vol 36 (7) ◽  
pp. 636-636
Author(s):  
William L. Hays
Keyword(s):  
Historical Perspective
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