Investigation of Non-equibiaxial Thin Film Stress by Using Stoney Formula

2016 ◽  
pp. 307-319
Author(s):  
Wei-Chung Wang ◽  
Po-Yu Chen ◽  
Yen-Ting Wu
Keyword(s):  
Thin Film ◽  
Film Stress ◽  
Thin Film Stress ◽  
Stoney Formula

On the Stoney Formula for a Thin Film/Substrate System With Nonuniform Substrate Thickness

2007 ◽  
Vol 74 (6) ◽  
pp. 1276-1281 ◽  
Author(s):  
X. Feng ◽  
Y. Huang ◽  
A. J. Rosakis
Keyword(s):  
Thin Film ◽  
Misfit Strain ◽  
Film Stress ◽  
Substrate Thickness ◽  
Full Field ◽  
Temperature Changes ◽  
Thin Film Stress ◽  
Curvature Measurements ◽  
Film Substrate ◽  
Stoney Formula

Current methodologies used for the inference of thin film stress through system curvature measurements are strictly restricted to stress and curvature states which are assumed to remain uniform over the entire film/substrate system. Recently Huang, Rosakis, and co-workers [Acta Mech. Sinica, 21, pp. 362–370 (2005); J. Mech. Phys. Solids, 53, 2483–2500 (2005); Thin Solid Films, 515, pp. 2220–2229 (2006); J. Appl. Mech., in press; J. Mech. Mater. Struct., in press] established methods for the film/substrate system subject to nonuniform misfit strain and temperature changes. The film stresses were found to depend nonlocally on system curvatures (i.e., depend on the full-field curvatures). These methods, however, all assume uniform substrate thickness, which is sometimes violated in the thin film/substrate system. Using the perturbation analysis, we extend the methods to nonuniform substrate thickness for the thin film/substrate system subject to nonuniform misfit strain.

scholarly journals Controlling Thin-Film Stress and Wrinkling during Perovskite Film Formation

2018 ◽  
Vol 3 (6) ◽  
pp. 1225-1232 ◽  
Author(s):  
Kevin A. Bush ◽  
Nicholas Rolston ◽  
Aryeh Gold-Parker ◽  
Salman Manzoor ◽  
Jakob Hausele ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Film Stress ◽  
Thin Film Stress

Growth of patterned island arrays to identify origins of thin film stress

2014 ◽  
Vol 115 (12) ◽  
pp. 123519 ◽  
Author(s):  
E. Chason ◽  
J. W. Shin ◽  
C.-H. Chen ◽  
A. M. Engwall ◽  
C. M. Miller ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Stress ◽  
Thin Film Stress
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