Full-Field Identification of Interfaces in Microelectronic Devices

Author(s):  
A. P. Ruybalid ◽  
J. P. M. Hoefnagels ◽  
O. van der Sluis ◽  
M. G. D. Geers
2018 ◽  
Vol 38 (16) ◽  
pp. 5569-5579 ◽  
Author(s):  
R. Vargas ◽  
J. Neggers ◽  
R.B. Canto ◽  
J.A. Rodrigues ◽  
F. Hild

2005 ◽  
Vol 24 (3) ◽  
pp. 442-451 ◽  
Author(s):  
Stéphane Roux ◽  
François Hild ◽  
Stéphane Pagano

2017 ◽  
Vol 118-119 ◽  
pp. 213-223 ◽  
Author(s):  
J. Neggers ◽  
F. Mathieu ◽  
F. Hild ◽  
S. Roux ◽  
N. Swiergiel

2020 ◽  
Vol 226 ◽  
pp. 106879
Author(s):  
A.P. Ruybalid ◽  
O. van der Sluis ◽  
M.G.D. Geers ◽  
J.P.M. Hoefnagels

Author(s):  
R. F. Schneidmiller ◽  
W. F. Thrower ◽  
C. Ang

Solid state materials in the form of thin films have found increasing structural and electronic applications. Among the multitude of thin film deposition techniques, the radio frequency induced plasma sputtering has gained considerable utilization in recent years through advances in equipment design and process improvement, as well as the discovery of the versatility of the process to control film properties. In our laboratory we have used the scanning electron microscope extensively in the direct and indirect characterization of sputtered films for correlation with their physical and electrical properties.Scanning electron microscopy is a powerful tool for the examination of surfaces of solids and for the failure analysis of structural components and microelectronic devices.


Author(s):  
L. J. Chen ◽  
L. S. Hung ◽  
J. W. Mayer

When an energetic ion penetrates through an interface between a thin film (of species A) and a substrate (of species B), ion induced atomic mixing may result in an intermixed region (which contains A and B) near the interface. Most ion beam mixing experiments have been directed toward metal-silicon systems, silicide phases are generally obtained, and they are the same as those formed by thermal treatment.Recent emergence of silicide compound as contact material in silicon microelectronic devices is mainly due to the superiority of the silicide-silicon interface in terms of uniformity and thermal stability. It is of great interest to understand the kinetics of the interfacial reactions to provide insights into the nature of ion beam-solid interactions as well as to explore its practical applications in device technology.About 500 Å thick molybdenum was chemical vapor deposited in hydrogen ambient on (001) n-type silicon wafer with substrate temperature maintained at 650-700°C. Samples were supplied by D. M. Brown of General Electric Research & Development Laboratory, Schenectady, NY.


ENTOMON ◽  
2019 ◽  
Vol 44 (1) ◽  
pp. 23-32 ◽  
Author(s):  
P. C. Sujitha ◽  
G. Prasad ◽  
R. Nitin ◽  
Dipendra Nath Basu ◽  
Krushnamegh Kunte ◽  
...  

Eurema nilgiriensis Yata, 1990, the Nilgiri grass yellow, was described from Nilgiris in southern India. There are not many published records of this species since its original description, and it was presumed to be a high-elevation endemic species restricted to its type locality. Based on the external morphology (wing patterns) as well as the male genitalia, the first confirmed records of the species from Agasthyamalais and Kodagu in the southern Western Ghats, is provided here. This report is a significant range extension for the species outside the Nilgiris, its type locality. Ecological data pertaining to this species as well as the field identification key to all known Eurema of Western Ghats are also presented.


Author(s):  
S. Andrietti ◽  
M. Bernacki ◽  
N. Bozzolo ◽  
L. Maire ◽  
P. De Micheli ◽  
...  
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