Combined SIMS and Electron Spectroscopy Investigation of the Chemical State of Some Ion-Implanted Transition Metals and Steels

1984 ◽  
pp. 221-224
Author(s):  
W. M. Bone ◽  
T. M. Barlak ◽  
I. L. Singer ◽  
R. A. Jeffries ◽  
R. J. Colton
Keyword(s):  
Transition Metals ◽  
Electron Spectroscopy ◽  
Chemical State ◽  
Ion Implanted

Gettering Behavior of Transition Metals in Low Energy, High Dose Ion Implanted Silicon

2012 ◽  
Vol 187 ◽  
pp. 283-286 ◽  
Author(s):  
Koichiro Saga
Keyword(s):  
Transition Metals ◽  
High Energy ◽  
Low Energy ◽  
Silicon Surfaces ◽  
High Dose ◽  
Metal Impurities ◽  
Surface Metal ◽  
Recombination Centers ◽  
Detrimental Impact ◽  
Ion Implanted

Metallic contamination on silicon surfaces has a detrimental impact on ULSI device performance and yield. Surface metal impurities degrade gate oxide integrity, while metal impurities dissolved in silicon provide recombination centers, resulting in junction leakage. Surface metal impurities penetrate silicon by the collision with dopant during ion implantation and are also diffused in silicon by subsequent annealing [. If metal impurities are present around junctions, they can cause junction leakage. In order to avoid the junction leakage, metal impurities must be away from junction. It was reported that iron can be gettered in the region of dopants implanted at high energy [. On the other hand, little work has been reported on the behavior of metal impurities in shallow junction. In this study, the gettering behavior of various transition metals in low-energy and high-dose ion-implanted silicon has been demonstrated.

Electron Spectroscopy on Adsorption of Cs on Transition Metals

1983 ◽  
Vol T4 ◽  
pp. 110-112 ◽  
Author(s):  
P Soukiassian ◽  
R Riwan ◽  
C Guillot ◽  
J Lecante ◽  
Y Borensztein
Keyword(s):  
Transition Metals ◽  
Electron Spectroscopy

Chemical state and morphology of Zn and Mg ion-implanted polyvinyl alcohol

2020 ◽  
Vol 389 ◽  
pp. 125558
Author(s):  
O.A. Laput ◽  
D.A. Zuza ◽  
I.V. Vasenina ◽  
I.A. Kurzina
Keyword(s):  
Polyvinyl Alcohol ◽  
Chemical State ◽  
Ion Implanted

Unstable valence rare earths ion implanted into transition metals: Valence variation studies

1988 ◽  
Vol 63 (8) ◽  
pp. 3692-3694 ◽  
Author(s):  
F. Lu ◽  
S. Gunapala ◽  
M. Croft ◽  
N. G. Stoffel ◽  
M. L. den Boer
Keyword(s):  
Transition Metals ◽  
Rare Earths ◽  
Ion Implanted

scholarly journals The Chemical State of Eu Ion Implanted into a Barrier Type Anodic Alumina Films

2004 ◽  
Vol 55 (1) ◽  
pp. 71-75 ◽  
Author(s):  
Go TANIGAWA ◽  
Issei MIZUKI ◽  
Shigeyoshi MORISAKI
Keyword(s):  
Anodic Alumina ◽  
Chemical State ◽  
Alumina Films ◽  
Barrier Type ◽  
Ion Implanted
Sign in / Sign up

Export Citation Format

Share Document